Solution-phase deposition and nanopatterning of GeSbSe phase-change materials

Nature Materials

Volumn 6, Issue 5, 2007, Pages 352-356

  Milliron, Delia J ^a   Raoux, Simone ^a   Shelby, Robert M ^a   Jordan Sweet, Jean ^b  

^a IBM ALMADEN RESEARCH CENTER   (United States)

^b IBM T J WATSON RESEARCH CENTER   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

AMORPHOUS MATERIALS; ANNEALING; DATA STORAGE EQUIPMENT; PHASE TRANSITIONS; SEMICONDUCTING GERMANIUM COMPOUNDS; TRANSISTORS;

CHALCOGENIDE FILMS; NANOPATTERNING; PHASE DEPOSITION; PHASE-CHANGE RANDOM-ACCESS MEMORY (PCRAM);

PHASE CHANGE MATERIALS;

EID: 34247842778     PISSN: 14761122     EISSN: 14764660     Source Type: Journal    
DOI: 10.1038/nmat1887     Document Type: Article

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