Linear optical encoders manufactured by imprint lithography

Microelectronic Engineering

Volumn 83, Issue 4-9 SPEC. ISS., 2006, Pages 897-901

  Merino, S ^a   Retolaza, A ^a   Lizuain, I ^a  

^a IK4 TEKNIKER   (Spain)

Author keywords

Dimensional metrology; Nanoimprint lithography; Optical encoders

Indexed keywords

LITHOGRAPHY; OPTICAL RESOLVING POWER; PATTERN RECOGNITION; SILICON; TRANSFER FUNCTIONS;

DIMENSIONAL METROLOGY; MICROSCALE RANGE; NANOIMPRINT LITHOGRAPHY; OPTICAL ENCODERS; PYREX;

OPTICAL DEVICES;

EID: 33646482444     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.mee.2006.01.018     Document Type: Article

References (5)

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