Sub-100nm hybrid stamp fabrication by hot embossing

Materials Science Forum

Volumn 510-511, Issue , 2006, Pages 462-465

  Hong, Sung Hoon ^a   Yang, Kiyeon ^a   Lee, Heon ^a  

^a Korea University   (South Korea)

Author keywords

Flexible; Hot embossing; Nanoimprint lithography; PVC; Stamp; UV NIL

Indexed keywords

COST EFFECTIVENESS; FABRICATION; NANOIMPRINT LITHOGRAPHY; POLYMER MATRIX;

IMPRINTING STAMPS; IMPRINTING TEMPLATES; POLYMER STAMPS;

NANOSTRUCTURED MATERIALS;

ASSEMBLY; COST EFFECTIVENESS; EMBOSSING; HOT FORMING; POLYMERS;

EID: 34247555287     PISSN: 02555476     EISSN: 16629752     Source Type: Book Series    
DOI: 10.4028/0-87849-995-4.462     Document Type: Conference Paper

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