Influence of polymer formation on metalorganic vapor-phase epitaxial growth of AlN

Journal of Crystal Growth

Volumn 304, Issue 1, 2007, Pages 133-140

  Uchida, Takeshi ^a   Kusakabe, Kazuhide ^a   Ohkawa, Kazuhiro ^a,b  

^a TOKYO UNIVERSITY OF SCIENCE   (Japan)

^b JAPAN SCIENCE AND TECHNOLOGY AGENCY   (Japan)

Author keywords

A1. Computer simulation; A3. Metalorganic vapor phase epitaxy; B1. AlN

Indexed keywords

COMPUTER SIMULATION; CRYSTAL GROWTH; GROWTH RATE; HIGH TEMPERATURE EFFECTS; POLYMERIZATION; VAPOR PHASE EPITAXY;

GAS-PHASE CHEMISTRY; GROWTH RATES; METALORGANIC VAPOR-PHASE EPITAXY;

ALUMINUM COMPOUNDS;

EID: 34247556993     PISSN: 00220248     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.jcrysgro.2007.01.022     Document Type: Article

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