A resonant method for determining mechanical properties of Si3N4 and SiO2 thin films

Materials Letters

Volumn 61, Issue 14-15, 2007, Pages 3089-3092

  Dai, Ching Liang ^a   Chang, Yuan Ming ^a  

^a NATIONAL CHUNG HSING UNIVERSITY   (Taiwan)

Author keywords

Poisson's ratio; Thin films; Young's modulus

Indexed keywords

ELASTIC MODULI; MICROMACHINING; NATURAL FREQUENCIES; POISSON RATIO; SILICA; SILICON NITRIDE;

CANTILEVER PLATES; MICROCANTILEVER BEAMS; RESONANT METHOD;

THIN FILMS;

EID: 34247542661     PISSN: 0167577X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.matlet.2006.11.031     Document Type: Article

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