Fabrication and measurement of low-stress membrane mirrors for adaptive optics

Applied Optics

Volumn 43, Issue 18, 2004, Pages 3573-3580

  Kurczynski, Peter ^a   Dyson, Harold M ^a   Sadoulet, Bernard ^a   Bower, J Eric ^b   Lai, Warren Y C ^b   Mansfield, William M ^b   Taylor, J Ashley ^c  

^a UNIVERSITY OF CALIFORNIA   (United States)

^b New Jersey Nanotechnology Consortium   (United States)

^c LUCENT TECHNOLOGIES   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

BORON; DEFORMATION; ELECTRODES; FLIP CHIP DEVICES; LITHOGRAPHY; MICROELECTROMECHANICAL DEVICES; MIRRORS; SILICON; SILICON NITRIDE; SINGLE CRYSTALS; STRESSES;

FLIP-CHIP BONDING; LOW-STRESS MEMBRANES; MICROELECTROMECHANICAL SYSTEMS (MEMS); SINGLE-CRYSTAL SILICON;

ADAPTIVE OPTICS;

EID: 3042720067     PISSN: 1559128X     EISSN: 15394522     Source Type: Journal    
DOI: 10.1364/AO.43.003573     Document Type: Article

References (18)

1. R. B. Aldrich, "Deformable mirror wavefront correctors," in Adaptive Optics Engineering Handbook, R. K. Tyson, ed. (Marcel Dekker, New York, 2000), pp. 151-197; see also other chapters in the same volume.
2. G. Vdovin and P. M. Sarro, "Flexible mirror micromachined in silicon," Appl. Opt. 34, 2968-2972 (1995).
3. L. Zhu, P.-C. Sun, D.-U. Bartsch, W. R. Freeman, and Y. Fainman, "Adaptive control of a micromachined continuous-membrane deformable mirror for aberration compensation," Appl. Opt. 38, 168-178 (1999).
4. I. Iglesias and P. Artal, "Closed loop adaptive optics in the human eye," Opt. Lett. 26, 746-748 (2001).
5. L. Zhu, P.-C. Sun, D.-U. Bartsch, W. R. Freeman, and Y. Fainman, "Wave-front generation of Zernike polynomial modes with a micromachined membrane deformable mirror," Appl. Opt. 38, 6019-6026 (1999).
6. C. Paterson, I. Munro, and J. C. Dainty, "A low cost adaptive optics system using a membrane mirror," Opt. Express 6, 175-185 (2000), http://www.opticsexpress.org.
7. R. K. Tyson and B. W. Frazier, "Microelectromechanical system programmable aberration generator for adaptive optics," Appl. Opt. 38, 168-178 (1999).
8. O. Albert, L. Sherman, G. Mourou, T. B. Norris, and G. Vdovin, "Smart microscope: an adaptive optics learning system for aberration correction in multiphoton confocal microscopy," Opt. Lett. 26, 52-54 (2000).
9. G. Vdovin and V. Kiyko, "Intracavity control of a 200-W continuous-wave Nd:YAG laser by a micromachined deformable mirror," Opt. Lett. 28, 798-800 (2001).
10. H. M. Dyson, R. M. Sharples, N. A. Dipper, and G. V. Vdovin, "Cryogenic wavefront correction using membrane deformable mirrors," Opt. Express 8, 17-26 (2001), http://www.opticsexpress.org.
11. R. Aberman, "Measurements of the intrinsic stress in thin metal films," Vacuum 41, 1279-1282 (1990).
12. J. Floro, S. Hearne, J. Hunter, P. Kotula, E. Chason, S. Seel, and C. Thompson, "The dynamic competition between stress generation and relaxation mechanisms during coalescence of Volmer-Weber thin films," J. Appl. Phys. 89, 4886-4897 (2001).
13. L. I. Maissel and R. Glang, Handbook of Thin Film Technology (McGraw-Hill, New York, 1970), pp. 12-22-12-32.
14. L. Sauter, Stress and Creep in Thin Metal Films from Resonance Measurements, internal rep. (Agere Systems, Murray Hill, N.J.).
15. J. F. Nye, Physical Properties of Crystals (Clarendon, New York, 1957), p. 145.
16. E. J. Fernandez and P. Artal, "Membrane deformable mirror for adaptive optics: performance limits in visual optics," Opt. Express 11, 1056-1069 (2003), http://www.opticsexpress.org.
17. S. Timoshenko and S. Woinowsky-Krieger, Theory of Plates and Shells (McGraw-Hill, New York, 1959).
18. L. D. Landau and E. M. Lifshitz, Theory of Elasticity, Vol. 7 of Course in Theoretical Physics (Butterworth-Heineman, Boston, Mass., 1959).