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Volumn 1, Issue , 2003, Pages 368-371
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Micro-jet nozzle array for precise droplet metering and steering having increased droplet deflection
a a a a a a a a |
Author keywords
CMOS process; CMOS technology; Fabrication; Fluid flow; Geometry; Laboratories; Reproducibility of results; Reservoirs; Temperature; Very large scale integration
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Indexed keywords
ACTUATORS;
CMOS INTEGRATED CIRCUITS;
DROPS;
FABRICATION;
FLOW OF FLUIDS;
GEOMETRY;
LABORATORIES;
MICROSYSTEMS;
NOZZLES;
PETROLEUM RESERVOIRS;
SOLID-STATE SENSORS;
TEMPERATURE;
TRANSDUCERS;
VLSI CIRCUITS;
CMOS PROCESSS;
CMOS TECHNOLOGY;
DROPLET SIZES;
FABRICATION METHOD;
MODEL RESULTS;
REPRODUCIBILITIES;
SIZE DROPLETS;
VLSI TECHNOLOGY;
SPRAY NOZZLES;
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EID: 84944716018
PISSN: None
EISSN: None
Source Type: Conference Proceeding
DOI: 10.1109/SENSOR.2003.1215330 Document Type: Conference Paper |
Times cited : (8)
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References (6)
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