MEMS-based piezoelectric array microjet

Microelectronic Engineering

Volumn 66, Issue 1-4, 2003, Pages 767-772

  Yuan, Songmei ^a   Zhou, Zhaoying ^a   Wang, Guohui ^a   Liu, Changgeng ^a  

^a TSINGHUA UNIVERSITY   (China)

Author keywords

Aerosol therapy; MEMS; Microjet; Piezoelectric transducer

Indexed keywords

AEROSOLS; DRUG THERAPY; JETS; NONINVASIVE MEDICAL PROCEDURES; NOZZLES; PIEZOELECTRIC MATERIALS; PIEZOELECTRIC TRANSDUCERS;

MICROJETS;

MICROELECTROMECHANICAL DEVICES;

EID: 0037391704     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0167-9317(02)00997-8     Document Type: Article

References (8)

1. Zhou Z., Wang X., et al. Micro electro-mechanical systems. J. Chin. Mech. Eng. (in Chinese). 11:(2):2000;163-168.
2. Zhou Z., Ye X., et al. Micro machine and its development. Proc. Instrum. Meters (in Chinese). 17:(1):1996;20-25.
3. Liu C., Zhou Z., et al. Research on a piezoelectrically actuator micro droplet generator. Micro/Nanometer Sci. Technol. (in Chinese). 5:2000;183-185.
4. de Heij B., van der Schoot B., de Rooij N.F., et al. Characterisation of a piezo-actuated fL droplet generator. Proceedings of the 13th European Conference on Solid-State Transducers. 1999;687-690.
5. Waanders J.W. Piezoelectric Ceramics Properties and Applications. 1991;Philips Components. 38 pp.
6. Allaverdiev A.M., Akhmedov N.B., Shermergor T.D. Coupled flexural-shear oscillations of stepwise-layered piezoceramic disk transducers. Sov. Appl. Mech. 23:(5):1987;465-471.
7. Hassan A., Ahmed A., Janakiram R. Effects of zero-mass synthetic jets on the aerodynamics of the NACA-00012 airfoil. J. Am. Helicopter Soc. 43:(4):1998;303-311.
8. Chu X.C., Yan R.B., Yan L., et al. A quantitative circuit model of the stator of piezoelectric ultrasonic motor. Key Eng. Mater. 224:2002;135-138.