A modular high density multi-channel dispenser for micro-array printing

TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers

Volumn 1, Issue , 2003, Pages 372-375

  Kuoni, A ^a   Boillat, M ^b   De Rooij, N F ^a  

^a UNIVERSITY OF NEUCHÂTEL   (Switzerland)

^b Seyonic SA   (Switzerland)

Author keywords

Bonding processes; Dry etching; Electric variables measurement; Fabrication; Finite element methods; Piezoelectric actuators; Polyimides; Printing; Pulse measurements; Shape measurement

Indexed keywords

ACTUATORS; DISPENSERS; DRY ETCHING; ELECTRIC VARIABLES MEASUREMENT; FABRICATION; FINITE ELEMENT METHOD; MICROSYSTEMS; PIEZOELECTRICITY; POLYIMIDES; PRINTING; SOLID-STATE SENSORS; TRANSDUCERS; VIDEO CAMERAS;

ACTUATOR DISPLACEMENT; BONDING PROCESS; ELECTRICAL PULSE; FLEXIBLE POLYIMIDE SUBSTRATE; MICRO-ARRAY PRINTING; PULSE MEASUREMENTS; SHAPE MEASUREMENTS; THERMAL BONDING;

PIEZOELECTRIC ACTUATORS;

EID: 84944715333     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/SENSOR.2003.1215331     Document Type: Conference Paper

References (3)

1. A. Kuoni, R. Holzherr, M. Boillat and N. F. de Rooij, "A Polyimide membrane with ZnO piezoelectric thin film pressure transducers as a differential pressure liquid flow sensor," Proceedings Micromechanics Europe MME'02, Sinaia, 267-270 (Sept. 2002).
2. D. Wallace, H.-J. Trost, U. Eichenlaub, "Multifluid Ink-jet array for manufacturing of Chip-based microarray systems," Proceedings of Second International Conference on Microreaction Technology, 1-5 (March 1998).
3. T. Laurell, L. Wallman and J. Nilsson, "Design and development of a silicon microfabricated flow-through dispenser for on-line picolitre sample handling," J. Micromech. Microeng., 9, 369-376 (1999).