Effects of periodicity and oxygen partial pressure on the crystallinity and dielectric property of artificial SrTiO3/BaTiO3 superlattices integrated on Si substrates by pulsed laser deposition method

Thin Solid Films

Volumn 515, Issue 16 SPEC. ISS., 2007, Pages 6438-6441

  Kim, Bo Ram ^a   Kim, Tae Un ^a   Lee, Won Jae ^b   Moon, Jong Ha ^a   Lee, Byung Teak ^a   Kim, Hong Seung ^c   Kim, Jin Hyeok ^a  

^a Chonnam National University   (South Korea)

^b Dong Eui University   (South Korea)

^c Korea Maritime University   (South Korea)

Author keywords

Artificial superlattices; Crystalline oxide on Si; Dielectric properties; Heteroepitaxial growth; Pulsed laser deposition; Thin films

Indexed keywords

EPITAXIAL GROWTH; OXYGEN; PERMITTIVITY; PULSED LASER DEPOSITION; STRONTIUM COMPOUNDS; X RAY DIFFRACTION ANALYSIS;

ARTIFICIAL SUPERLATTICES; CRYSTALLINITY; EPITAXIAL ORIENTATION; EPITAXY NATURE; OXYGEN PARTIAL PRESSURE; SUPERLATTICE THIN FILMS;

SUPERLATTICES;

EID: 34247501224     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2006.11.047     Document Type: Article

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