Yttrium oxide thin films: Influence of the oxygen vacancy network organization on the microstructure

Thin Solid Films

Volumn 515, Issue 16 SPEC. ISS., 2007, Pages 6385-6390

  Jublot, M ^a   Paumier, F ^a   Pailloux, F ^a   Lacroix, B ^a   Leau, E ^a   Guerin P ^a   Marteau, M ^a   Jaouen, M ^a   Gaboriaud, R J ^a   Imhoff, D ^b  

^a UNIVERSITÉ DE POITIERS   (France)

^b UNIVERSITÉ PARIS SUD   (France)

Author keywords

Crystallographic phases; Oxygen vacancy network; Rare Earth Oxyde; Thin film

Indexed keywords

ELECTRON ENERGY LOSS SPECTROSCOPY; MICROSTRUCTURE; PHASE TRANSITIONS; STOICHIOMETRY; TRANSMISSION ELECTRON MICROSCOPY; YTTRIUM OXIDE;

CRYSTALLOGRAPHIC PHASES; OXYGEN VACANCY; OXYGEN VACANCY NETWORK; RARE EARTH OXIDE;

THIN FILMS;

EID: 34247497202     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2006.11.177     Document Type: Article

References (13)

1. Gaboriaud R.J., Pailloux F., Guerin P., and Paumier F. J. Phys., D, Appl. Phys. 33 (2000) 2884
2. Paumier F., Gaboriaud R.J., and Kaul A. Cryst. Eng. 5 (2002) 169
3. D'Heurle F.M., and Harper J.M.E. Thin Solid Films 171 (1989) 81
4. Fukumoto H., Imura T., and Osaka Y. Appl. Phys. Lett. 55 (1989) 360
5. Evangelou E.K., Wiemer C., Fanciulli M., Sethu M., and Cranton W. J. Appl. Phys. 94 1 (2003) 318
6. Gaboriaud R.J., Pailloux F., Guerin P., and Paumier F. Thin Solid Films 400 (2001) 106
7. Paumier F., and Gaboriaud R.J. Thin Solid Films 441 (2003) 307
8. Gaboriaud R.J., Paumier F., Pailloux F., and Guerin P. Mater. Sci. Eng., B, Solid-State Mater. Adv. Technol. 109 (2004) 34
9. Solov'eva A.E. Neorg. Mater. 21 (1985) 808
10. Pailloux F., Jublot M., Gaboriaud R.J., Jaouen M., and Paumier F. Phys. Rev., B 72 (2005) 125425
11. Ziegler J.F., Biersack J.P., and Littmark U. The Stopping and Range of Ions in Solids (1985), Pergamon Press, New York
12. Tang M., Valdez J.A., Lu P., Gosnell G.E., Wetteland C.J., and Sickafus K.E. J. Nucl. Mater. 328 (2004) 71
13. Hemon S., Dufour C., Berthelot A., Gourbilleau F., Paumier E., and Bégin-Collin S. Nucl. Instrum. Methods Phys. Res., B Beam Interact. Mater. Atoms 166-167 (2000) 339