Biocompatible coatings for CMUTs in a harsh, aqueous environment

Journal of Micromechanics and Microengineering

Volumn 17, Issue 5, 2007, Pages 994-1001

  Zhuang, X ^a   Nikoozadeh, A ^a   Beasley, M A ^a   Yaralioglu, G G ^a   Khuri Yakub, B T ^a   Pruitt, B L ^a  

^a Stanford University   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

BIOCOMPATIBILITY; CAPACITANCE; ELECTRIC POTENTIAL; IMAGING TECHNIQUES; MICROMACHINING; NATURAL FREQUENCIES; PASSIVATION; ULTRASONIC TRANSDUCERS;

CORROSIVE ENVIRONMENT; MECHANICAL CHARACTERISTICS; POLYDIMETHYLSILOXANE (PDMS);

COATINGS;

EID: 34247492054     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/17/5/020     Document Type: Article

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