Novel environmentally-friendly corrosion-free post-stripping rinsing procedure after solvent strip

Digest of Technical Papers - Symposium on VLSI Technology

Volumn , Issue , 1997, Pages 37-38

  Vos, Rita ^a   Rotondaro, Antonio ^a   Mertens, Paul W ^a   Meuris, Marc ^a   Heyns, Marc ^a  

^a IMEC   (Belgium)

Author keywords

[No Author keywords available]

Indexed keywords

CHEMICAL CLEANING; METALLIZING; NITRIC ACID; SOLVENTS; STRIPPING (REMOVAL);

POST STRIPPING RINSING;

INTEGRATED CIRCUIT MANUFACTURE;

EID: 0030681621     PISSN: 07431562     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (8)