Optical absorption and emission spectroscopy studies of ammonia-containing plasmas

Plasma Sources Science and Technology

Volumn 16, Issue 2, 2007, Pages 265-272

  Kang, S J ^a   Donnelly, V M ^a  

^a UNIVERSITY OF HOUSTON   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

AMMONIA; ARGON; CALIBRATION; DISSOCIATION; EMISSION SPECTROSCOPY; LIGHT ABSORPTION; NITROGEN;

CALIBRATION FACTOR; SELF-ACTINOMETRY; TORR PLASMAS; TOTAL NITROGEN CONTENT;

PLASMAS;

EID: 34247478572     PISSN: 09630252     EISSN: 13616595     Source Type: Journal    
DOI: 10.1088/0963-0252/16/2/008     Document Type: Article

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