On-chip vacuum microtriode using carbon nanotube field emitters

Applied Physics Letters

Volumn 80, Issue 20, 2002, Pages 3820-3822

  Bower, C ^a   Zhu, W ^a   Shalom, D ^a   Lopez, D ^a   Chen, L H ^a   Gammel, P L ^a   Jin, S ^a  

^a AGERE SYSTEMS   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CARBON NANOTUBE FIELD EMITTERS; FABRICATION TECHNOLOGIES; FIELD EMITTER; FULLY INTEGRATED; MEMS DESIGN; ON CHIPS; SILICON MICROMACHINING; SILICON SURFACES; VACUUM DEVICES;

FABRICATION; MEMS; MICROELECTROMECHANICAL DEVICES; MICROMACHINING; SOLID STATE DEVICES; VACUUM;

CARBON NANOTUBES;

EID: 79958226945     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1480884     Document Type: Article

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