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Volumn 6186, Issue , 2006, Pages

A large deflection translatory actuator for optical path length modulation

Author keywords

Fourier Transform Spectroscopy; FTIR; Micro Mirror

Indexed keywords

CRYSTALLINE MATERIALS; FOURIER TRANSFORM INFRARED SPECTROSCOPY; INTERFEROMETERS; MIRRORS; OSCILLATIONS; SILICON;

EID: 33746768235     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.662853     Document Type: Conference Paper
Times cited : (8)

References (8)
  • 2
    • 0029419192 scopus 로고
    • Advanced silicon etching using high density plasmas
    • SPIE-2639
    • Bhardwaj J., Ashraf H.,: Advanced silicon etching using high density plasmas, Micromachining & Microfabrication, 224-233, SPIE-2639, 1995
    • (1995) Micromachining & Microfabrication , pp. 224-233
    • Bhardwaj, J.1    Ashraf, H.2
  • 3
    • 33746727716 scopus 로고    scopus 로고
    • Application of a micromachined translatory actuator to an optical FTIR spectrometer
    • Kenda, A., Drabe, C., Schenk, H., Frank, A., Scherf, W.: Application of a Micromachined Translatory Actuator to an optical FTIR Spectrometer, SPIE 6186-09, 2006
    • (2006) SPIE , vol.6186 , Issue.9
    • Kenda, A.1    Drabe, C.2    Schenk, H.3    Frank, A.4    Scherf, W.5
  • 5
    • 33746716630 scopus 로고
    • Verfahren zum anisotropen Ätzen von Silicium, Deutsches Patent DE 42 41 045 Cl
    • Lärmer F., Schilp A. : Verfahren zum anisotropen Ätzen von Silicium, Deutsches Patent DE 42 41 045 Cl, 1992
    • (1992)
    • Lärmer, F.1    Schilp, A.2
  • 8
    • 33746702409 scopus 로고    scopus 로고
    • Nodal analysis for MEMS design using SUGAR vO.5
    • Technical Digest
    • Zhou, N., Clark, J., Pister, K.: Nodal Analysis for MEMS Design Using SUGAR vO.5, In Technical Digest. Solid-State Sensor Workshop, pages 191-196, 1998.
    • (1998) Solid-state Sensor Workshop , pp. 191-196
    • Zhou, N.1    Clark, J.2    Pister, K.3


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.