-
1
-
-
3843075534
-
New numerical techniques and tools in SUGAR for 3D MEMS simulation
-
March
-
Bai, Z., Bindel, D., Clark, J., Demmel, J., Pister, K., Zhou, N.: New Numerical Techniques and Tools in SUGAR for 3D MEMS Simulation, Tech Proc 4th Intl Conf On Modeling and Simulation of Microsystems, March 2001
-
(2001)
Tech Proc 4th Intl Conf on Modeling and Simulation of Microsystems
-
-
Bai, Z.1
Bindel, D.2
Clark, J.3
Demmel, J.4
Pister, K.5
Zhou, N.6
-
2
-
-
0029419192
-
Advanced silicon etching using high density plasmas
-
SPIE-2639
-
Bhardwaj J., Ashraf H.,: Advanced silicon etching using high density plasmas, Micromachining & Microfabrication, 224-233, SPIE-2639, 1995
-
(1995)
Micromachining & Microfabrication
, pp. 224-233
-
-
Bhardwaj, J.1
Ashraf, H.2
-
3
-
-
33746727716
-
Application of a micromachined translatory actuator to an optical FTIR spectrometer
-
Kenda, A., Drabe, C., Schenk, H., Frank, A., Scherf, W.: Application of a Micromachined Translatory Actuator to an optical FTIR Spectrometer, SPIE 6186-09, 2006
-
(2006)
SPIE
, vol.6186
, Issue.9
-
-
Kenda, A.1
Drabe, C.2
Schenk, H.3
Frank, A.4
Scherf, W.5
-
4
-
-
32044467159
-
Stress optimization of a micromechanical torsional spring
-
Klose, T., Kunze, D., Sandner, T., Schenk, H., Lakner, H., Schneider, A., Schneider, P.: Stress optimization of a micromechanical torsional spring, NanoTech, 2005
-
(2005)
NanoTech
-
-
Klose, T.1
Kunze, D.2
Sandner, T.3
Schenk, H.4
Lakner, H.5
Schneider, A.6
Schneider, P.7
-
5
-
-
33746716630
-
-
Verfahren zum anisotropen Ätzen von Silicium, Deutsches Patent DE 42 41 045 Cl
-
Lärmer F., Schilp A. : Verfahren zum anisotropen Ätzen von Silicium, Deutsches Patent DE 42 41 045 Cl, 1992
-
(1992)
-
-
Lärmer, F.1
Schilp, A.2
-
6
-
-
85122657205
-
A new driving principle for micromechanical torsional actuators
-
MEMS, Nashville
-
Schenk, H., Dürr, P., Kunze, D., Kück, H., : A new driving principle for micromechanical torsional actuators, International Mechanical Engineering Congress and Exposition, MEMS-Vol. 1, pp. 333-338, Nashville, 1999.
-
(1999)
International Mechanical Engineering Congress and Exposition
, vol.1
, pp. 333-338
-
-
Schenk, H.1
Dürr, P.2
Kunze, D.3
Kück, H.4
-
7
-
-
32044467968
-
A modular approach for simulation based optimization of MEMS
-
November
-
Schneider, P., Parodat, S., Schneider, A., Schwarz, P.: A modular approach for simulation based optimization of MEMS, Design, Modeling, and Simulation in Microelectronics, November 2000.
-
(2000)
Design, Modeling, and Simulation in Microelectronics
-
-
Schneider, P.1
Parodat, S.2
Schneider, A.3
Schwarz, P.4
-
8
-
-
33746702409
-
Nodal analysis for MEMS design using SUGAR vO.5
-
Technical Digest
-
Zhou, N., Clark, J., Pister, K.: Nodal Analysis for MEMS Design Using SUGAR vO.5, In Technical Digest. Solid-State Sensor Workshop, pages 191-196, 1998.
-
(1998)
Solid-state Sensor Workshop
, pp. 191-196
-
-
Zhou, N.1
Clark, J.2
Pister, K.3
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