A large deflection translatory actuator for optical path length modulation

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 6186, Issue , 2006, Pages

  Drabe, Christian ^a   Klose, Thomas ^a   Schenk, Harald ^a   Wolter, Alexander ^a   Lakner, Hubert ^a  

^a FRAUNHOFER INSTITUTE FOR PHOTONIC MICROSYSTEMS   (Germany)

Author keywords

Fourier Transform Spectroscopy; FTIR; Micro Mirror

Indexed keywords

CRYSTALLINE MATERIALS; FOURIER TRANSFORM INFRARED SPECTROSCOPY; INTERFEROMETERS; MIRRORS; OSCILLATIONS; SILICON;

FOURIER TRANSFORM SPECTROSCOPY; MICRO MIRROR; RESONANT STRUCTURE; SHOCK RESISTIVITY;

LIGHT MODULATION;

EID: 33746768235     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.662853     Document Type: Conference Paper

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