Analysis and optimization of multilayer silver superlenses for near-field optical lithography

Physica B: Condensed Matter

Volumn 394, Issue 2, 2007, Pages 197-202

  Melville, David O S ^a,b   Blaikie, Richard J ^a  

^a UNIVERSITY OF CANTERBURY   (New Zealand)

^b IBM T J WATSON RESEARCH CENTER   (United States)

Author keywords

Near field imaging; Photolithography; Superlens; Surface plasmons

Indexed keywords

GRADIENT INDEX OPTICS; LENSES; LIGHT TRANSMISSION; MULTILAYERS; PHOTOLITHOGRAPHY; SURFACE PLASMON RESONANCE; TRANSFER FUNCTIONS;

NEAR-FIELD IMAGING; SUPERLENSES;

SILVER COMPOUNDS;

EID: 34247357025     PISSN: 09214526     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.physb.2006.12.048     Document Type: Article

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