Experimental observations of temperature-dependent flat band voltage transients on high-k dielectrics

Microelectronics Reliability

Volumn 47, Issue 4-5 SPEC. ISS., 2007, Pages 653-656

  Duenas S ^a   Castan H ^a   Garcia H ^a   Bailon L ^a   Kukli, K ^b,c   Hatanpaa T ^c   Ritala, M ^c   Leskela M ^c  

^a UNIVERSITY OF VALLADOLID   (Spain)

^b UNIVERSITY OF TARTU   (Estonia)

^c UNIVERSITY OF HELSINKI   (Finland)

Author keywords

[No Author keywords available]

Indexed keywords

DIELECTRIC FILMS; ELECTRIC FIELDS; GADOLINIUM COMPOUNDS; LEAKAGE CURRENTS; MOS DEVICES; PHONONS; SILICON;

FLAT BAND VOLTAGE TRANSIENTS; GADOLINIUM OXIDES; PHONON ENERGY;

TRANSIENTS;

EID: 34247152984     PISSN: 00262714     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.microrel.2007.01.080     Document Type: Article

References (9)

1. Wilk G.D., Wallace R.M., and Anthony J.M. J Appl Phys 89 (2001) 5243
2. Lim S.G., Kriventsov S., Jackson T.N., Haeni J.H., Schlom D.G., Balbashov A.M., et al. J Appl Phys 91 (2002) 4500
3. Leskela M., and Ritala M. J Solid State Chem 171 (2003) 170
4. Park B.E., and Ishiwara H. Appl Phys Lett 82 (2003) 1197
5. Lucovsky G., Zhang Y., Whitten J.L., Schlom D.G., and Freeouf J.L. Microelectron Eng 72 (2004) 288
6. Zafar S., Kumar A., Gusev E., and Cartier E. IEEE Tans Dev Mater Rel 5 1 (2005) 45
7. Suntola T. Thin Solid Films 216 (1992) 84
8. Fischetti M.V., Neumayer D.A., and Cartier E.A. J Appl Phys 90 (2001) 4587
9. Niklasson G.A., and Brantervik K. J Appl Phys 59 (1986) 980