Diffusion annealing of Mo/MoSi2 couple and silicon diffusivity in Mo5Si3 layer

Materials Science and Engineering: A

Volumn 459, Issue 1-2, 2007, Pages 227-232

  Chatilyan, H A ^a   Kharatyan, S L ^a,b   Harutyunyan, A B ^a  

^a INSTITUTE OF ORGANIC CHEMISTRY   (Armenia)

^b YEREVAN STATE UNIVERSITY   (Armenia)

Author keywords

Diffusion; Kinetics; Molybdenum; Silane; Silicides

Indexed keywords

ANNEALING; DIFFUSION; INTERFACES (MATERIALS); KINEMATICS; SILICON;

DIFFUSION ANNEALING; SOLID-PHASE DIFFUSION;

MOLYBDENUM COMPOUNDS;

ANNEALING; DIFFUSION; INTERFACES (MATERIALS); KINEMATICS; MOLYBDENUM COMPOUNDS; SILICON;

EID: 34247133098     PISSN: 09215093     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.msea.2007.01.026     Document Type: Article

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