SCOPUS 정보 검색 플랫폼

Thin Solid Films

Volumn 405, Issue 1-2, 2002, Pages 170-178

Multilayer diffusional growth in silicon-molybdenum interactions

(5) Yoon, Jin Kook a Byun, Ji Young a Kim, Gyeung Ho a Kim, Jae Soo a Choi, Chong Sool b

a Korea Institute of Science and Technology (South Korea)

b Yonsei University (South Korea)

Author keywords

Chemical vapor deposition (CVD); Diffusion; Molybdenum silicides; Multilayer

Indexed keywords

CHEMICAL VAPOR DEPOSITION; DIFFUSION IN SOLIDS; GROWTH KINETICS; MIXTURES; MOLYBDENUM; MULTILAYERS; PHASE DIAGRAMS; THERMAL EFFECTS; THIN FILMS; TRANSMISSION ELECTRON MICROSCOPY;

MUTILAYER DIFFUSIONAL GROWTH;

SILICON;

EID: 0037154924 PISSN: 00406090 EISSN: None Source Type: Journal
DOI: 10.1016/S0040-6090(01)01750-3 Document Type: Article

Times cited : (24)

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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.