Microorganisms for MEMS

Journal of Microelectromechanical Systems

Volumn 16, Issue 2, 2007, Pages 429-444

  Xiong, Xiaorong ^a   Lidstrom, Mary E ^b   Parviz, Babak A ^c  

^a INTEL CORPORATION   (United States)

^b UNIVERSITY OF WASHINGTON   (United States)

^c University of Washington   (United States)

Author keywords

Biotic MEMS; Functional structure; Integrated system; Material synthesis; Sensors and actuators; Uni and multicellular microorganisms

Indexed keywords

ACTUATORS; CHEMICAL SENSORS; MICROFABRICATION; MICROORGANISMS; PHOTOLITHOGRAPHY; SYNTHESIS (CHEMICAL);

SELF-REPLICATING BIOLOGICAL ENTITIES;

MEMS;

EID: 34147187303     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/JMEMS.2006.885851     Document Type: Article

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