Post-crystallization of metal-induced laterally crystallized poly-Si with YAG laser

Digest of Technical Papers - SID International Symposium

Volumn 37, Issue 1, 2006, Pages 227-230

  Meng, Zhiguo ^a,b   Zhang, Dongli ^a   Wu, Chunya ^a,b   Zhang, Bo ^a   Kwok, Hoi Sing ^a   Wong, Man ^a  

^a HONG KONG UNIVERSITY OF SCIENCE AND TECHNOLOGY   (Hong Kong)

^b NANKAI UNIVERSITY   (China)

Author keywords

[No Author keywords available]

Indexed keywords

CHARACTERIZATION; HEAT TREATMENT; OPTIMIZATION; SOLID STATE LASERS; THIN FILM TRANSISTORS; THIN FILMS; YTTRIUM COMPOUNDS;

FRACTIONS; MATERIAL QUALITY; POST-CRYSTALLIZATION;

POLYSILICON;

EID: 34147173041     PISSN: 0097966X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1889/1.2433461     Document Type: Conference Paper

References (10)

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