Measurement of elastic properties of thin film ZnO by resonance method

Proceedings of the Annual IEEE International Frequency Control Symposium

Volumn , Issue , 1998, Pages 783-789

  Jade, Sachin A ^a   Smits, Jan G ^a  

^a BOSTON UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CERAMIC MATERIALS; ELASTIC MODULI; ELECTRIC FIELD EFFECTS; ETCHING; LASER BEAMS; NATURAL FREQUENCIES; PIEZOELECTRIC MATERIALS; SILICON WAFERS; SPUTTERING; THIN FILMS;

CERAMIC BIMORPH; ELECTRIC SIGNAL; PIEZOELECTRIC BIMORPH;

SEMICONDUCTING ZINC COMPOUNDS;

EID: 0032311860     PISSN: 01616404     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (2)