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Volumn 4, Issue , 2003, Pages

CMOS integrated gas sensor chip using SAW technology

Author keywords

[No Author keywords available]

Indexed keywords

ACOUSTIC SURFACE WAVE DEVICES; CMOS INTEGRATED CIRCUITS; ELECTRIC DELAY LINES; MICROELECTROMECHANICAL DEVICES; NATURAL FREQUENCIES; PHASE SHIFT; PIEZOELECTRIC TRANSDUCERS; SYSTEMS ANALYSIS;

EID: 0038080931     PISSN: 02714310     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper
Times cited : (11)

References (12)
  • 5
    • 0003196681 scopus 로고    scopus 로고
    • Special issue on integrated sensors, microactuators, and microsystems (MEMS)
    • Aug.
    • Special issue on integrated sensors, microactuators, and Microsystems (MEMS), Proc. of the IEEE, vol. 86, no. 8, Aug. 1998.
    • (1998) Proc. of the IEEE , vol.86 , Issue.8
  • 7
    • 0003445588 scopus 로고    scopus 로고
    • Review of chemical sensors for in- situ monitoring of voltile contaminants
    • SAND 2001-0643, March
    • Clifford k.Ho, Michael T. Itamura, Michael Kelley, and Robert C. Hughes, Review of Chemical Sensors for In- Situ Monitoring of Voltile Contaminants, Sandia Report, SAND 2001-0643, March 2001.
    • (2001) Sandia Report
    • Ho, C.K.1    Itamura, M.T.2    Kelley, M.3    Hughes, R.C.4
  • 10
    • 0038668236 scopus 로고    scopus 로고
    • http://www.MEMS_EXCHANGE.com.
  • 12
    • 0000476437 scopus 로고
    • Surface acoustic wave chemical sensors
    • MY, Tokyo
    • M. S. Nieuwenhuizen and A. Venema, "Surface Acoustic Wave Chemical Sensors," Sensors and Materials, Vol. 5, pp. 261-300, MY, Tokyo, 1989.
    • (1989) Sensors and Materials , vol.5 , pp. 261-300
    • Nieuwenhuizen, M.S.1    Venema, A.2


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.