-
1
-
-
0003571345
-
-
Academic Press, New York
-
D. S. Ballantine, R. M. White, S. J. Martin, A. J. Ricco, E. T. Zellers, G. C. Frye, H. Wohltjen, Acoustic Wave Sensors: Theory, Design, and Priysico-Chemical Applications, Academic Press, New York, 1997.
-
(1997)
Acoustic Wave Sensors: Theory, Design, and Priysico-Chemical Applications
-
-
Ballantine, D.S.1
White, R.M.2
Martin, S.J.3
Ricco, A.J.4
Zellers, E.T.5
Frye, G.C.6
Wohltjen, H.7
-
2
-
-
0029732304
-
Laminated high-aspect ratio microstructures in a conventional CMOS process
-
G. K. Fedder, S. Santhanam, M. L. Reed, S. C. Eagle, D. F. Guillou, M. S.-C. Lu, and L. R. Carley, "Laminated high-aspect ratio microstructures in a conventional CMOS process," Proc. of IEEE MEMS Workshop (MEMS'96), pp. 3-18, 1996.
-
(1996)
Proc. of IEEE MEMS Workshop (MEMS'96)
, pp. 3-18
-
-
Fedder, G.K.1
Santhanam, S.2
Reed, M.L.3
Eagle, S.C.4
Guillou, D.F.5
Lu, M.S.-C.6
Carley, L.R.7
-
3
-
-
0003779676
-
Silicon microsensors and microstructures
-
H. Baltes, T. Boltshauser, O. Brand, R. Lenggenhager, and D. Jaeggi, "Silicon microsensors and microstructures," Proc. of IEEE Int. Symp. on Circuits and Systems, pp 1820-1823, 1992.
-
(1992)
Proc. of IEEE Int. Symp. on Circuits and Systems
, pp. 1820-1823
-
-
Baltes, H.1
Boltshauser, T.2
Brand, O.3
Lenggenhager, R.4
Jaeggi, D.5
-
4
-
-
0031375239
-
Hybrid postprocessing etching for CMOS-compatible MEMS
-
Dec.
-
N. Tea, V. Milanovic, C. A. Zincke, J. S. Suehle, M. Gaitan, M. E. Zaghloul, and J. Geist, "Hybrid postprocessing etching for CMOS-compatible MEMS," J. of MEMS, vol. 6, no. 4, pp. 363-371, Dec. 1997.
-
(1997)
J. of MEMS
, vol.6
, Issue.4
, pp. 363-371
-
-
Tea, N.1
Milanovic, V.2
Zincke, C.A.3
Suehle, J.S.4
Gaitan, M.5
Zaghloul, M.E.6
Geist, J.7
-
5
-
-
0003196681
-
Special issue on integrated sensors, microactuators, and microsystems (MEMS)
-
Aug.
-
Special issue on integrated sensors, microactuators, and Microsystems (MEMS), Proc. of the IEEE, vol. 86, no. 8, Aug. 1998.
-
(1998)
Proc. of the IEEE
, vol.86
, Issue.8
-
-
-
7
-
-
0003445588
-
Review of chemical sensors for in- situ monitoring of voltile contaminants
-
SAND 2001-0643, March
-
Clifford k.Ho, Michael T. Itamura, Michael Kelley, and Robert C. Hughes, Review of Chemical Sensors for In- Situ Monitoring of Voltile Contaminants, Sandia Report, SAND 2001-0643, March 2001.
-
(2001)
Sandia Report
-
-
Ho, C.K.1
Itamura, M.T.2
Kelley, M.3
Hughes, R.C.4
-
8
-
-
0003337025
-
Implementation of CMOS compatible conductance-based micro-gas-sensor system
-
August
-
M Afridi, J. Suehle, M. Zaghloul, J. Tiffany, R. Cavicchi, "Implementation of CMOS Compatible Conductance-Based Micro-Gas-Sensor System," European Conference on Circuit Theory and Design, pp. (III) 381-384, August 2001.
-
(2001)
European Conference on Circuit Theory and Design
-
-
Afridi, M.1
Suehle, J.2
Zaghloul, M.3
Tiffany, J.4
Cavicchi, R.5
-
9
-
-
0037991850
-
Transient heating study of microhotplates by using high- speed thermal imaging system
-
March 12-14
-
M.Afridi, D. Berning, A. Hefner, J. Suehle, M.Zaghloul, E.Kelly, Z. Parilla, C. Ellenwood, "Transient Heating Study of Microhotplates by Using High- Speed Thermal Imaging System", the Proceeding of Semi-Therm XVIII, March 12-14, 2002.
-
(2002)
Proceeding of Semi-Therm XVIII
-
-
Afridi, M.1
Berning, D.2
Hefner, A.3
Suehle, J.4
Zaghloul, M.5
Kelly, E.6
Parilla, Z.7
Ellenwood, C.8
-
10
-
-
0038668236
-
-
http://www.MEMS_EXCHANGE.com.
-
-
-
-
12
-
-
0000476437
-
Surface acoustic wave chemical sensors
-
MY, Tokyo
-
M. S. Nieuwenhuizen and A. Venema, "Surface Acoustic Wave Chemical Sensors," Sensors and Materials, Vol. 5, pp. 261-300, MY, Tokyo, 1989.
-
(1989)
Sensors and Materials
, vol.5
, pp. 261-300
-
-
Nieuwenhuizen, M.S.1
Venema, A.2
|