Deformation behavior during nanoindentation of epitaxial ZnO thin films on sapphire substrate

Materials Letters

Volumn 61, Issue 11-12, 2007, Pages 2443-2445

  Navamathavan, R ^a   Kim, Kyoung Kook ^a   Hwang, Dae Kue ^a   Park, Seong Ju ^a   Lee, Tae Geol ^b   Kim, Gwang Seok ^b   Hahn, Jun Hee ^b  

^a Gwangju Institute of Science and Technology (GIST)   (South Korea)

^b Korea Research Institute of Standards and Science   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

DISLOCATIONS (CRYSTALS); FILM THICKNESS; MAGNETRON SPUTTERING; NANOINDENTATION; SAPPHIRE; ZINC OXIDE;

RADIO FREQUENCY MAGNETRON SPUTTERING;

EPITAXIAL FILMS;

EID: 34147100481     PISSN: 0167577X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.matlet.2006.09.032     Document Type: Article

References (14)

1. Service R.F. Science 276 (1997) 895
2. Bagnall D.M., Chen Y.F., Zhu Z., Yao T., Koyama S., Shen M.Y., and Goto T. Appl. Phys. Lett. 70 (1997) 2230
3. Kucheyev S.O., Bradby J.E., Williams J.S., Jegadish C., and Swain M.V. Appl. Phys. Lett. 80 (2002) 956
4. Bradby J.E., Kucheyev S.O., Williams J.S., Jegadish C., Swain M.V., Munroe P., and Phillips M.R. Appl. Phys. Lett. 80 (2002) 4537
5. Mayo M.J., Siegel R.W., Liao Y.X., and Nix W.D. J. Mater. Res. 7 (1992) 973
6. Saitoh H., Namioka Y., Sugata H., and Ohshio S. Jpn. J. Appl. Phys. 40 (2001) 6024
7. Coleman V.A., Bradby J.E., Jegadish C., Munroe P., Heo Y.W., Pearton S.J., Norton D.P., Inoue M., and Yano M. Appl. Phys. Lett. 86 (2005) 203105-1
8. Kim K.K., Song J.H., Jung H.J., Choi W.K., Park S.J., Song J.H., and Lee J.Y. J. Vac. Sci. Technol. A18 (2000) 2864
9. Kim K.K., Song J.H., Jung H.J., Choi W.K., Park S.J., and Song J.H. J. Appl. Phys. 87 (2000) 3573
10. Ning X.J., Chien F.R., Pirouz P., Yang J.W., and Asif Khan M. J. Mater. Res. 11 (1996) 580
11. Navamathavan R., Moon Y.T., Kim G.S., Lee T.G., Hahn J.H., and Park S.J. Mater. Chem. Phys. 99 (2006) 410
12. Look D.C. Mater. Sci. Eng., B 80 (2001) 383
13. Ko H.J., Chen Y.F., Zhu Z., Yao T., Kobayashi I., and Uchiki H. Appl. Phys. Lett. 76 (2000) 1905
14. Caceres D., Vergara I., Gonzalez R., Monroy E., Calle F., Munoz E., and Omnes F. J. Appl. Phys. 86 (1999) 6773