Density evaluation of silicon thermal-oxide layers on silicon crystals by the pressure-of-flotation method

IEEE Transactions on Instrumentation and Measurement

Volumn 56, Issue 2, 2007, Pages 628-631

  Waseda, Atsushi ^a   Fujii, Kenichi ^a  

^a NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY AIST   (Japan)

Author keywords

Avogadro constant; Density; Pressure of flotation (PF); Silicon; Thermal oxide

Indexed keywords

CRYSTALS; DENSITY MEASUREMENT (SPECIFIC GRAVITY); PRESSURE; THICKNESS MEASUREMENT; THIN FILMS;

AVOGADRO CONSTANT; SILICON CRYSTALS; THERMAL OXIDE;

SEMICONDUCTING SILICON;

EID: 34047237350     PISSN: 00189456     EISSN: None     Source Type: Journal    
DOI: 10.1109/TIM.2007.890781     Document Type: Conference Paper

References (8)

1. K. Fujii, M. Tanaka, Y. Nezu, K. Nakayama, H. Fujimoto, P. De Bièvre, and S. Valkiers, "Determination of the Avogadro constant by accurate measurement of the molar volume of a silicon crystal," Metrologia, vol. 36, no. 5, pp. 455-464, Oct. 1999.
2. K. Fujii, A. Waseda, N. Kuramoto, S. Mizushima, M. Tanaka, S. Valkiers, P. Taylor, R. Kessel, and P. De Bièvre, "Evaluation of the molar volume of silicon crystals for a determination of the Avogadro constant," IEEE Trans. Instrum. Meas., vol. 52, no. 2, pp. 646-651, Apr. 2003.
3. A. F. Kozdon and F. Spieweck, "Determination of differences in the density of silicon single crystals by observing their flotation at different pressures," IEEE Trans. Instrum. Meas., vol. 41, no. 3, pp. 420-426, Jun. 1992.
4. A. Waseda and K. Fujii, "Density comparison measurement of silicon by pressure of flotation method," IEEE Trans. Instrum. Meas., vol. 50, no. 2, pp. 604-607, Apr. 2001.
5. A. Waseda and K. Fujii, "High precision density comparison measurement of silicon crystals by the pressure of flotation method," Meas. Sci. Technol., vol. 12, no. 12, pp. 2039-2045, Dec. 2001.
6. A. Waseda and K. Fujii, "Density comparison measurements of silicon crystals by a pressure-of- flotation method at NMIJ," Metrologia, vol. 41, no. 2, pp. S62-S67, Apr. 2004.
7. A. Waseda, K. Fujii, and N. Taketoshi, "Density measurement of a thin film by the pressure-of-flotation method," IEEE Trans. Instrum. Meas., vol. 54, no. 2, pp. 882-885, Apr. 2005.
8. D. E. Gray, Ed., American Institute of Physics Handbook, 3rd ed. New York: McGraw-Hill, 1972, pp. 3-102.