Density measurement of a thin-film by the pressure-of-flotation method

IEEE Transactions on Instrumentation and Measurement

Volumn 54, Issue 2, 2005, Pages 882-885

  Waseda, Atsushi ^a   Fujii, Kenichi ^a   Taketoshi, Naoyuki ^a  

^a NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY AIST   (Japan)

Author keywords

Avogadro constant; Density; Pressure of flotation method (PFM); Silicon crystal; Thickness; Thin film

Indexed keywords

LATTICE CONSTANTS; MOLYBDENUM; SILICON; SINGLE CRYSTALS; SPUTTERING; SUBSTRATES; TEMPERATURE CONTROL; THICKNESS MEASUREMENT; THIN FILMS;

AVOGADRO CONSTANT; PRESSURE-OF-FLOTATION (PFM) METHOD; SILICON CRYSTAL;

DENSITY MEASUREMENT (SPECIFIC GRAVITY);

EID: 17444382703     PISSN: 00189456     EISSN: None     Source Type: Journal    
DOI: 10.1109/TIM.2005.843523     Document Type: Article

References (6)

1. K. Fujii, M. Tanaka, Y. Nezu, K. Nakayama, H. Fujimoto, P. De Bièvre, and S. Valkiers, "Determination of the Avogadro constant by accurate measurement of the molar volume of a silicon crystal," Metrologia vol. 36, pp. 455-464, 1999.
2. K. Fujii, A. Waseda, N. Kuramoto, S. Mizushima, M. Tanaka, S. Valkiers, P. Taylor, R. Kessel, and P. De Bièvre, "Evaluation of the molar volume of silicon crystals for a determination of the Avogadro constant," IEEE Trans. Instrum. Meas, vol. 52, no. 2, pp. 646-651, Apr. 2003.
3. A. F. Kozdon and F. Spieweck, "Determination of differences in the density of silicon single crystals by observing their flotation at different pressures," IEEE Trans. Instrum. Meas, vol. 41, no. 3, pp. 420-426, Jun. 1992.
4. A. Waseda and K. Fujii, "Density comparison measurement of silicon by pressure of flotation method," IEEE Trans. Instrum. Meas, vol. 50, no. 2, pp. 604-607, Apr. 2001.
5. A. Waseda and K. Fujii, "High precision density comparison measurement of silicon crystals by the pressure of flotation method," Meas. Sci. Tech., vol. 12, pp. 2039-2045, 2001.
6. A. Waseda and K. Fujii, "Density comparison measurements of silicon crystals by a pressure-of-flotation method at NMIJ," Metrologia, vol. 41, pp. S62-S67, 2004.