Nanomechanical characterization of polymer beam structures for BioMEMS applications

Sensors and Actuators, A: Physical

Volumn 135, Issue 2, 2007, Pages 637-650

  Palacio, Manuel ^a   Bhushan, Bharat ^a   Ferrell, Nicholas ^b   Hansford, Derek ^b  

^a OHIO STATE UNIVERSITY   (United States)

^b Ohio State University   (United States)

Author keywords

Beam bending; Bending strength; BioMEMS; Cantilevers; Elastic modulus; Nanoindentation; Yield strength

Indexed keywords

BIOMECHANICS; ELASTIC MODULI; MICROSTRUCTURE; NANOINDENTATION; NANOMECHANICS; ORGANIC POLYMERS; YIELD STRESS;

BEAM BENDING; BIOMICROELECTROMECHANICAL SYSTEM (BIOMEMS); DRUG SCREENING;

MEMS;

EID: 34047167637     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2006.09.010     Document Type: Article

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