A non-contact linear bearing and actuator via ultrasonic levitation

Sensors and Actuators, A: Physical

Volumn 135, Issue 2, 2007, Pages 740-747

  Ide, Takeshi ^a   Friend, James ^a   Nakamura, Kentaro ^a   Ueha, Sadayuki ^a  

^a TOKYO INSTITUTE OF TECHNOLOGY   (Japan)

Author keywords

Acoustic levitation; Clean room; Linear actuator; Non contact actuator; Piezoelectric actuator

Indexed keywords

ACOUSTIC EMISSIONS; ACOUSTIC TRANSDUCERS; MAGNETIC FIELD EFFECTS; PIEZOELECTRIC ACTUATORS;

FLEXURAL VIBRATION; LINEAR ACTUATORS; NEAR FIELD ACOUSTIC LEVITATION (NFAL); PRECISION ACTUATORS; ULTRASONIC LEVITATION;

BEARINGS (MACHINE PARTS);

EID: 34047160644     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2006.08.005     Document Type: Article

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