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Volumn 49, Issue 5 A, 2007, Pages
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Large-area helicon plasma source with permanent magnets
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Author keywords
[No Author keywords available]
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Indexed keywords
COMPUTATIONAL METHODS;
HELICONS;
OPTIMIZATION;
PERMANENT MAGNETS;
DOWNSTREAM DENSITIES;
MAGNET SIZE;
RADIOFREQUENCY (RF) ANTENNA;
PLASMA SOURCES;
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EID: 34047154127
PISSN: 07413335
EISSN: 13616587
Source Type: Journal
DOI: 10.1088/0741-3335/49/5A/S07 Document Type: Article |
Times cited : (48)
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References (22)
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