Characteristics of end Hall ion source with magnetron hollow cathode discharge

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 257, Issue 1-2 SPEC. ISS., 2007, Pages 796-800

  Tang, Deli ^a,b   Wang, Lisheng ^a   Pu, Shihao ^a,b   Cheng, Changming ^a   Chu, Paul K ^b  

^a SOUTHWESTERN INSTITUTE OF PHYSICS   (China)

^b CITY UNIVERSITY OF HONG KONG   (Hong Kong)

Author keywords

End Hall; Hollow cathode discharge; Ion source; Magnetron

Indexed keywords

CURRENT DENSITY; ELECTROSTATIC DISCHARGE; FLOW OF GASES; HALL MOBILITY; ION BEAMS; MAGNETRONS;

END HALL; HOLLOW CATHODE DISCHARGES; ION SOURCE; LOW ENERGY ION BEAMS;

ION SOURCES;

EID: 33947710147     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.nimb.2007.01.089     Document Type: Article

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