A cold-cathode source of low-energy low-divergent broad ion beams

Review of Scientific Instruments

Volumn 71, Issue 10, 2000, Pages 3662-3667

  Gavrilov, N V ^a   Emlin, D R ^a   Kuleshov, S V ^a  

^a INSTITUTE OF ELECTROPHYSICS   (Russian Federation)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0038326155     PISSN: 00346748     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1313795     Document Type: Article

References (17)

1. S. I. Molokovskii and A. D. Sushkov, in Intense Electron and Ion Beams (Energoatomizdat, Moscow, 1991), p. 137 (in Russian).
2. J. R. Coupland, T. S. Green, D. R. Hammond, and A. C. Riviere, Rev. Sci. Instrum. 44, 1258 (1973).
3. G. Aston, H. R. Kaufman, and P. J. Wilbur, AIAA J. 16, 516 (1978).
4. H. R. Kaufman, J. Vac. Sci. Technol. 21, 725 (1982).
5. N. V. Gavrilov and E. M. Oks, Nucl. Instrum. Methods Phys. Res. A 439, 31 (2000).
6. A. S. Metel, Zh. Tekh. Fiz. 54, 241 (1984) (in Russian) [Sov. Phys. Tech. Phys.].
7. N. V. Gavrilov, G. A. Mesyats, G. V. Radkovskii, and V. V. Bersenev, Surf. Coat. Technol. 96, 81 (1997).
8. N. V. Gavrilov, D. R. Emlin, and S. P. Nikulin, Tech. Phys. Lett. 25, 498 (1999).
9. O. V. Kozlov, in Electrical Probes in Plasmas (Atomizdat, Moscow, 1969), p. 151 (in Russian).
10. V. V. Bersenev, N. V. Gavrilov, and G. V. Radkovskii, Proceedings of the IV Conference on Modification of Materials by Charged Particles Beams, Tomsk, Russia, 1996, Vol. 1, p. 66 (in Russian).
11. Yu. P. Raizer, in Physics of Gas Discharges (Nauka, Moscow, 1987), p. 288 (in Russian).
12. W. L. Stirling, C. C. Tsai, and R. M. Ryan, Rev. Sci. Instrum. 48, 533 (1977).
13. N. V. Gavrilov, G. A. Mesyats, S. P. Nikulin, G. V. Radkovskii, A. Elkind, A. J. Perry, and J. R. Treglio, J. Vac. Sci. Technol. A 14, 1050 (1996).
14. K. W. Ehlers and K. N. Leung, Rev. Sci. Instrum. 52, 1452 (1981).
15. K. N. Leung, K. W. Ehlers, and M. Bacal, Rev. Sci. Instrum. 54, 56 (1983).
16. V. M. Kelman and S. Ya. Yavor, in Electron Optics (Nauka, Leningrad, 1968), p. 163 (in Russian).
17. W. S. Cooper, K. H. Berkner, and R. V. Ryle, Nucl. Fusion, 263 (1972).