Large-area surface treatment by ion beam technique

Surface and Coatings Technology

Volumn 140, Issue 1, 2001, Pages 35-43

  Wu, Richard L C ^a   Lanter, William ^a   Wrbanek, John ^a   DeJoseph, Charles ^b  

^a K Systems Corporation   (United States)

^b AIR FORCE RESEARCH LABORATORY   (United States)

Author keywords

Diamond like carbon; Ion beam technique; Surface treatment

Indexed keywords

ADHESION; ALUMINUM ALLOYS; DIAMOND LIKE CARBON FILMS; ENVIRONMENTAL IMPACT; ION BEAM ASSISTED DEPOSITION; ION BEAMS; ION SOURCES; MASS SPECTROMETERS; OPTIMIZATION; POLYCRYSTALLINE MATERIALS; QUALITY CONTROL; SILICON NITRIDE; STAINLESS STEEL; SUBSTRATES; SURFACE TREATMENT; ULTRAHIGH VACUUM;

ION BEAM TECHNIQUE;

SURFACE CHEMISTRY;

AEROSPACE APPLICATION; CORROSION PROTECTION; DEPOSITION; DIAMOND-LIKE CARBON; SURFACE TREATMENT;

EID: 0035933028     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0257-8972(01)01001-5     Document Type: Article

References (12)

1. Apparatus modification for large area surface treatment