Linear ion source with magnetron hollow cathode discharge

Review of Scientific Instruments

Volumn 76, Issue 11, 2005, Pages 1-4

  Tang, D L ^a   Pu, S H ^a   Wang, L S ^a   Qiu, X M ^a   Chu, Paul K ^b  

^a SOUTHWESTERN INSTITUTE OF PHYSICS   (China)

^b CITY UNIVERSITY OF HONG KONG   (Hong Kong)

Author keywords

[No Author keywords available]

Indexed keywords

CATHODES; CURRENT DENSITY; ELECTRONS; ION SOURCES; MAGNETRONS; OXYGEN; POLYETHYLENE TEREPHTHALATES;

ANODE LAYERS; HOLLOW CATHODE DISCHARGE; LINEAR ION BEAMS; REACTIVE GASES;

ELECTRIC DISCHARGES;

EID: 28444464814     PISSN: 00346748     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2130933     Document Type: Review

References (10)

1. H. R. Kaufman, R. S. Robinson, and R. I. Seddon, J. Vac. Sci. Technol. A 5, 2081 (1987).
2. W. C. Kim, K. H. Chung, and B. H. Choi, Rev. Sci. Instrum. 65, 1356 (1994).
3. V. V. Zhurin, H. R. Kaufman and R. S. Robinson, Plasma Sources Sci. Technol. 8, R1 (2000).
4. M. A. Vlasov, A. V. Zharinov, and Y. A. Kovalenko, Tech. Phys. 46, 1522 (2001).
5. D. P. Schmidt, N. B. Meezan, W. A. Hargus Jr., and M. A. Cappelli, Plasma Sources Sci. Technol. 9, 68 (1999).
6. A. Ide-Ektessabi, N. Yasui, and D. Okuyama, Rev. Sci. Instrum. 73, 873 (2002).
7. V. Dudnikov and A. Westner, Rev. Sci. Instrum. 73, 729 (2002).
8. A. I. Ryabchikov, I. B. Stepanov, S. V. Dekjarev, E. I. Lukonin, and I. A. Shulepov, Rev. Sci. Instrum. 71, 704 (2000).
9. D. Flamm and M. Zeuner, Surf. Coat. Technol. 119, 1089 (1999).
10. R. L. C. Wu, W. Lanter, J. Wrbanek, and C. Dejoseph, Surf. Coat. Technol. 140, 35 (2001).