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High Density, Sub 10mOhm Rdson 100Volt N-Channel FETs for Automotive Applications
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Toulouse, pp, May
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Y. Hattori, T. Suzuki, M. Kodama, E. Hayashi, T. Uesugi, "Shallow angle implantation for extended trench gate power MOSFETs with superjunction structure", Proceedings ISPSD'01 (Osaka), pp. 427-430, June 2001.
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