Using LTCC for microsystems

Microelectronics International

Volumn 19, Issue 3, 2002, Pages 19-23

  Thelemann, Torsten ^a   Thust, Heiko ^a   Hintz, Michael ^a  

^a ILMENAU UNIVERSITY OF TECHNOLOGY   (Germany)

Author keywords

3D; Lasers; Microfabrication

Indexed keywords

EID: 0036400705     PISSN: 13565362     EISSN: None     Source Type: Journal    
DOI: 10.1108/13565360210445005     Document Type: Article

References (7)