Characterization of the texture of silicide films using electron backscattered diffraction

Applied Physics Letters

Volumn 90, Issue 12, 2007, Pages

  De Keyser, K ^a   Detavernier, C ^a   Van Meirhaeghe, R L ^a  

^a GHENT UNIVERSITY   (Belgium)

Author keywords

[No Author keywords available]

Indexed keywords

BACKSCATTERING; ELECTRON DIFFRACTION; GERMANIUM COMPOUNDS; IMAGING SYSTEMS; NICKEL COMPOUNDS; VOLUME FRACTION;

ELECTRON BACKSCATTERED DIFFRACTION; NISI FILMS; SILICIDE FILMS; SPATIAL DISTRIBUTION;

THIN FILMS;

EID: 33947601586     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2716362     Document Type: Article

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