Fabrication of self-sealed circular nano/microfluidic channels in glass substrates

Nanotechnology

Volumn 18, Issue 13, 2007, Pages

  Wong, Chee Chung ^a,b   Agarwal, Ajay ^a   Balasubramanian, N ^a   Kwong, Dim Lee ^a  

^a INSTITUTE OF MICROELECTRONICS   (Singapore)

^b NANYANG TECHNOLOGICAL UNIVERSITY   (Singapore)

Author keywords

[No Author keywords available]

Indexed keywords

BOROSILICATE GLASS; CHANNEL FLOW; NANOSTRUCTURED MATERIALS; OPTICAL SENSORS; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; SILICON;

GLASS SUBSTRATES; GLASS WAFER; LATERAL VOIDS; TEMPERATURE ANNEALING;

MICROFLUIDICS;

NANOPARTICLE; OXIDE; SILICATE; SILICON;

ARTICLE; BLOOD FLOW; CHEMICAL BOND; ELECTROCHEMISTRY; FLUID FLOW; PRIORITY JOURNAL; VAPOR;

EID: 33947531758     PISSN: 09574484     EISSN: 13616528     Source Type: Journal    
DOI: 10.1088/0957-4484/18/13/135304     Document Type: Article

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