Application of pulsed laser deposition and laser-induced ion implantation for formation of semiconductor nano-crystallites

Laser and Particle Beams

Volumn 25, Issue 1, 2007, Pages 65-69

  WoLowski J ^a   Badziak, J ^a   Czarnecka, A ^a   Parys, P ^a   Pisarek, M ^b   Rosinski M ^a   Turan, R ^c   Yerci, S ^c  

^a SOLTAN INSTITUTE FOR NUCLEAR STUDIES   (Poland)

^b WARSAW UNIVERSITY OF TECHNOLOGY   (Poland)

^c MIDDLE EAST TECHNICAL UNIVERSITY   (Turkey)

Author keywords

Implantation of laser produced ions; Laser matter interaction; Nano technologies

Indexed keywords

ION IMPLANTATION; LASER ABLATION; LASER PULSES; NANOCRYSTALLITES; PARAMETER ESTIMATION; PULSED LASER DEPOSITION;

IMPLANTATION OF LASER PRODUCED IONS; LASER ION SOURCE (LIS); LASER MATTER INTERACTION; SEMICONDUCTOR NANOSTRUCTURES;

ION SOURCES;

EID: 33947418911     PISSN: 02630346     EISSN: 1469803X     Source Type: Journal    
DOI: 10.1017/S0263034607070103     Document Type: Article

References (19)

1. BOODY, F.P., HÖPFL, R., HORA, H. & KELLY, C.J. (1996). Laser-driven ion source for reduced-cost implantation of metal ions for strong reduction of dry friction and increased durability: Laser-Ion Sources. Laser Part. Beams 14, 443.
2. CHEN, X.Y., LU, Y.F., WU, Y.H., CHO, B.J., LIU, M.H., DAI, D.Y. & SONG, W.D. (2003). The mechanisms of photoluminescence from silicon nano-crystals formed by pulsed-laser deposition in argon and oxygen ambient. J. App. Phys. 93, 6311.
3. ELIEZER, S., ELIAZ, N., GROSSMAN, E., FISHER, D., GOUZMAN, I., HENIS, Z., PECKER, S., HOROVITZ, Y., FRAENKEL, M., MAMAN, S., EZERSKY, V. & ELIEZER, D. (2005). Nanoparticles and nanotubes induced by femtosecond lasers. Laser Part. Beams 23, 15-19.
4. FERNANDEZ, J.C., HEGELICH, B.M., COBBLE, J.A., FLIPPO, K.A., LETZRING, S.A., JOHNSON, R.P., GAUTIER, D.C., SHIMADA, T., KYRALA, G.A., WANG, Y.Q., WETTELAND, C.J. & SCHREIBER, J. (2005). Laser-ablation treatment of short-pulse laser targets: Toward an experimental program on energetic-ion interactions with dense plasmas. Laser Part. Beams 23, 267-273.
5. LÁSKA, L., KRÁSA, J., MAŚEK, K., PFEIFER, M., KRÁLIKOVÁ , B., MOCEK, T., SKÁLA, J., STRAKA, P., TRENDA, P., ROHLENA, K., WORYNA E., FARNY, J., PARYS, P., WOŁOWSKI, J., MRÓZ, W., SHUMSHUROV, A., SHARKOV, B., COLLIER, J., LANGBEIN, K. & HASEROTH, H. (1996). Iodine laser production of highly charged Ta ions. Czech. J. Phys. 46, 1099-1115.
6. LÁSKA, L., JUHA, L., KRÁSA, J., MAŚEK, K., PFEIFER, M., ROHLENA, K., KRÁLIKOVÁ, B., SKÁLA, J., PEŘINA, V., HNATOWICZ, V., WORYNA, E., WOŁOWSKI, J., PARYS, P., BOODY, F.P., HÖPFL, R. & HORA, H. (2000). Laser induced direct implantation of ions. Czech. J. Phys. 50, 81-90.
7. 2 films by ion implantation: Control of size and position. J. Non-Cryst. Solids 299-300, 1079-1083.
8. QI, B., GILGENBACH, R.M., LAU, Y.Y, JOHNSTON, M.D., LIAN, J., WANG, L.M., DOLL, G.L. & LAZARIDES, A. (2001). Ablation plasma ion implantation experiments: Measurement of Fe implantation into Si. Appl. Phys. Lett. 78, 3785-3788.
9. ROSIŃSKI, M., BADZIAK, J., BOODY, F.P., GAMMINO, S., HORA, L., KRÁSA, J., LÁSKA, L., MEZZASALMA, A.M., PARYS, P., ROHLENA, K., TORRISI, L., ULLSCHMIED, J., WOŁOWSKI, J. & WORYNA, E. (2005). Application of laser ion source for ion implantation technology. Vacuum 78, 435-438.
10. THAREJA, R.K. & SHARMA, A.K. (2006). Reactive pulsed laser ablation: Plasma studies. Laser Part. Beams 24, 311-320.
11. TORRISI, L., GAMMINO, S., PICCIOTTO, A., WOŁOWSKI, J., KRÁSA, J., LÁSKA, L., CALCAGNILE, L. & QUARTA, G. (2005). RBS analysis of ions implanted in light substrates exposed to hot plasmas laser-generated at PALS. Rad. Effects & Defects Solids 160, 685-695.
12. 2/Ar atmosphere. Laser Part. Beams 23, 149-153.
13. VEIKO, V.P., SHAKHNO, E.A., SMIRNOV, V.N., MIASKOVSKI, A.M. & NIKISHIN, G.D. (2006). Laser-induced film deposition by LIFT: Physical mechanisms and applications. Laser Part. Beams 24, 203-209.
14. WIEGER, V., STRASSL, M. & WINTNER, E. (2006). Pico- and microsecond laser ablation of dental restorative materials. Laser Part. Beams 24, 41-45.
15. WOŁOWSKI, J., BADZIAK, J., BOODY, F.P., GAMMINO, S., HORA, H., JUNGWIRTH, K., KRÁSA, J., LÁSKA, L., PARYS, P., PFEIFER, M., ROHLENA, K., SZYDLOWSKI, A., TORRISI, L., ULLSCHMIED, J. & WORYNA, E. (2003). Characteristics of ion emission from plasma produced by high-energy short-wavelength (438 nm) laser radiation. Plasma Phys. Contr. Fusion 45, 1087-93.
16. WOŁOWSKI, J., BADZIAK, J., CZARNECKA, A., BOODY, F.P., GAMMINO, S., KRÁSA, J., LÁSKA, L., MEZZASALMA, A., PARYS, P., ROSIŃSKI, M., ROHLENA, K., TORRISI, L. & ULLSCHMIED, J. (2005). Characteristics of laser-produced Ge ion fluxes used for modification of semiconductor materials. Rad. Effects & Defects Solids 160, 477-482.
17. WORYNA, E., WOŁOWSKI, J., KRÁ LIKOVÁ, B., KRÁSA, J., LÁSKA, L., PFEIFER, M., ROHLENA, K., SKÁLA, J., PERINA, V., BOODY, F.P., HÖPFL, R. & HORA, H. (2000). Laser produced Ag ions for direct implantation. Rev. Sci. Instrum. 71, 949-951.
18. WORYNA, E., PARYS, P., WOŁOWSKI, J. & MRÓZ, W. (1996). Corpuscular diagnostics and processing methods applied in investigations of laser-produced plasma as a source of highly ionized ions. Laser Part. Beams 14, 293-321.
19. 2 films. J. Appl. Phys. 82, 2704.