Effect of tin doping on the properties of indium-tin-oxide films deposited by radio frequency magnetron sputtering

Materials Science and Engineering: B

Volumn 138, Issue 3, 2007, Pages 271-276

  Yang, Chih Hao ^a   Lee, Shih Chin ^a   Lin, Tien Chai ^b   Zhuang, Wen Yan ^a  

^a NATIONAL CHENG KUNG UNIVERSITY   (Taiwan)

^b KUN SHAN UNIVERSITY   (Taiwan)

Author keywords

Annealing; Indium tin oxide; Physical vapor deposition (PVD); Resistivity; Sputtering; Tin

Indexed keywords

ANNEALING; CARRIER CONCENTRATION; CARRIER MOBILITY; DOPING (ADDITIVES); MAGNETRON SPUTTERING; PHYSICAL VAPOR DEPOSITION; THIN FILMS;

ANNEALING TEMPERATURE; INDIUM-TIN-OXIDE; OPTICAL BAND GAP;

TIN;

EID: 33947386674     PISSN: 09215107     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.mseb.2007.01.025     Document Type: Article

References (22)

1. Kim H.J., Bae J.W., Kim J.S., Kim K.S., Jang Y.C., Yeom G.Y., and Lee N.E. Surf. Coat. Technol. 131 (2000) 201
2. Zhu F., Huan C.H.A., Hang K.Z., and Wee A.T.S. Thin Solid Films 359 (2000) 244
3. Vasu V., and Subramaniam A. Thin Solid Films 193/194 (1990) 197
4. Yi C.H., Yasui I., and Shigesatio Y. Jpn. J. Appl. Phys. 34 (1995) 600
5. Cruz L.R., Legnani C., Matoso I.G., Ferrrira C.L., and Moutinho H.R. Mater. Res. Bull. 39 (2004) 993
6. Kim H., Gilmore C.M., Pique' A., Horwitz J.S., Mattoussi H., Murata H., Kafafi Z.H., and Chrisey D.B. J. Appl. Phys. 86 (1999) 6451
7. Kamei M., Shigesato Y., Yasui I., Taga N., and Takaki S. J. Non-Cryst. Solids 218 (1997) 267
8. Adurodija F.O., Izumi H., Ishihara T., Yoshioka H., and Motoyama M. J. Appl. Phys. 88 (2000) 4175
9. Lee H.C., and Ok Park O. Vacuum 75 (2004) 275
10. Hamberg I., and Granqvist C.G. J. Appl. Phys. 60 (1986) R123
11. Alam M.J., and Cameron D.C. Surf. Coat. Technol. 142 (2001) 776
12. Yang M., Yang X.L., Chen H.X., Shen J., and Jiang Y.M. Thin Solid Films 394 (2001) 219
13. Kamei M., Enomoto H., and Yasui I. Thin Solid Films 392 (2001) 265
14. Terzini E., Thilakan P., and Minarini C. Mater. Sci. Eng. B 77 (2000) 110
15. Meng L.J., Macarico A., and Martins R. Vacuum 46 (1995) 673
16. Han Y., Kim D., Cho J.S., Koh S.K., and Song Y.S. Solar Energy Mater. Solar Cells 65 (2001) 211
17. Cui H.N., and Xi S.Q. Thin Solid Films 288 (1996) 325
18. Alam M.J., and Cameron D.C. Thin Solid Films 00 (2000) 455
19. Morgan D.V., Aliyu Y.H., Bunce R.W., and Salehi A. Thin Solid Films 312 (1998) 268
20. Morgan D.V., Salehi A., Aliyu Y.H., and Bunce R.W. Renew. Energy 7 2 (1996) 205
21. Tariq B.M., Manzoor R.A., and Feheem K.A. Mater. Chem. Phys. 84 (2004) 126
22. Mori N., Ooki S., and Masubuchi N. Thin Solid Films 411 (2002) 6