E-manufacturing in the semiconductor industry

IEEE Robotics and Automation Magazine

Volumn 13, Issue 4, 2006, Pages 25-32

  Tag, Peter H ^b   Zhang, Mike Tao ^a  

^a INTEL CORPORATION   (United States)

^b Intel's Manufacturing Engineering Department

Author keywords

Cycle time; Factory performance; Preventive maintenance (PM); Semiconductor manufacturing; Variability

Indexed keywords

ALGORITHMS; ELECTRONICS INDUSTRY; FACTORY AUTOMATION; INTEGER PROGRAMMING; OPTIMIZATION; PREVENTIVE MAINTENANCE; SEMICONDUCTOR DEVICE MANUFACTURE;

ADVANCED SIMULATOR-OPTIMIZER SYSTEM; AUTOMATED REALTIME DISPATCHING; CYCLE TIME; FACTORY PERFORMANCE; SEMICONDUCTOR MANUFACTURING; VARIABILITY; WORK-IN-PROGRESS;

COMPUTER AIDED MANUFACTURING; SEMICONDUCTOR DEVICE MANUFACTURE;

EID: 33947368599     PISSN: 10709932     EISSN: None     Source Type: Journal    
DOI: 10.1109/MRA.2006.250570     Document Type: Article

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