Fab performance

IEEE Transactions on Semiconductor Manufacturing

Volumn 18, Issue 3, 2005, Pages 399-405

  De Ron, A J ^a   Rooda, J E ^a  

^a EINDHOVEN UNIVERSITY OF TECHNOLOGY   (Netherlands)

Author keywords

Fab performance; Manufacturing performance; Overall fab efficiency (OFE); Performance measures

Indexed keywords

APPROXIMATION THEORY; COMPETITION; COMPUTER SIMULATION; THROUGHPUT;

FAB PERFORMANCE; MANUFACTURING PERFORMANCE; OVERALL FAB EFFICIENCY (OFE); PERFORMANCE MEASURES;

SEMICONDUCTOR DEVICE MANUFACTURE;

EID: 25144516323     PISSN: 08946507     EISSN: None     Source Type: Journal    
DOI: 10.1109/TSM.2005.852106     Document Type: Article

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