Asymmetric dielectric trilayer cantilever probe for calorimetric high-frequency field imaging

Journal of Microelectromechanical Systems

Volumn 16, Issue 1, 2007, Pages 78-86

  Lee, Simone ^a,b   Wallis, T Mitch ^c   Moreland, John ^c   Kabos, Pavel ^c   Lee, Y C ^d  

^a UNIVERSITY OF COLORADO   (United States)

^b FORMFACTOR INC   (United States)

^c NATIONAL INSTITUTE OF STANDARDS AND TECHNOLOGY   (United States)

^d UCB 450   (United States)

Author keywords

Curvature; High frequency imaging; Microelectromechanical systems (MEMS) cantilever; Radio frequency (RF) probe

Indexed keywords

CALORIMETRY; MEMS; PROBES; SILICON NITRIDE; SURFACE MICROMACHINING;

BULK MICROMACHINING TECHNIQUES; HIGH-FREQUENCY MAGNETIC FIELD IMAGING; RADIO-FREQUENCY PROBE;

IMAGING TECHNIQUES;

EID: 33947215487     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/JMEMS.2006.885849     Document Type: Article

References (15)

1. Y. Gao and I. Wolff, "A new miniature magnetic field probe for measuring three-dimensional fields in planar high-frequency circuits," IEEE Trans. Microwave Theory Tech., vol. 44, pp. 911-918, Jun. 1996.
2. D. Smith, "Signal and noise measurement techniques using magnetic field probes," in Proc. 1999 IEEE Int. Symp. IEEE Electromagn. Compat., Aug. 2-6, 1999, vol. 1, pp. 559-563.
3. V. Agrawal, P. Neuzil, and D. W. van der Weide, "A microfabricated tip for simultaneous acquisition of sample topography and high-frequency magnetic field," Appl. Phys. Lett., vol. 71, no. 16, pp. 2343-2345, Oct. 1997.
4. A. Jander, J. Moreland, and P. Kabos, "All-dielectric micromachined calorimeter for high-resolution microwave power measurement," in Proc. 15th IEEE Int. Conf. Microelectromech. Syst. Conf., Jan 20-24, 2002, pp. 635-640.
5. J. R. Barnes, R. J. Stephenson, C. N. Woodburn, S. J. O'Shea, M. E. Welland, T. Rayment, J. K. Gimzewski, and C. Gerber, "A femtojoule calorimeter using micromechanical sensors," Rev. Sci. Instrum., vol. 65, no. 12, pp. 3793-3796, 1994.
6. J. Moreland, M. Lohndorf, and P. Kabos, "Ferromagnetic resonance spectroscopy with a micromechanical calorimeter sensor," Rev. Sci. Instrum., vol. 71, no. 8, pp. 3099-3103, 2000.
7. J. Lai, T. Perazzo, Z. Shi, and A. Majumdar, "Optimization and performance of high resolution micro-optomechanical thermal sensors," Sens. Actuators A, Phys., no. 58, pp. 113-119, 1997.
8. L. B. Freund and S. Suresh, Thin Film Materials: Stress, Defect Formation and Surface Evolution. Cambridge, U.K.: Cambridge Univ. Press, 2003.
9. Y. Zhang and M. Dunn, "Deformation of blanketed and patterned bilayer thin-film microstructures during post-release and cyclic thermal loading," J. Microelectromech. Syst., vol. 12, no. 6, pp. 788-796, 2003.
10. R. M. Jones, Mechanics of Composite Materials. Philadelphia, PA: Taylor & Francis, 1999.
11. R. J. Wood, E. Steltz, and R. S. Fearing, "Optimal energy density piezoelectric bending actuators," Sens. Actuators A, Phys., vol. 119, pp. 476-488, 2005.
12. C. V. Thompson, "Structure evolution during processing of polycrystalline films," Annu. Rev. Mater. Sci., vol. 30, pp. 159-190, 2000.
13. P. J. French, P. M. Sarro, R. Mallee, E. J. M. Fakkeldij, and R. F. Wolffenbuttle, "Optimization of a low-stress silicon nitride process for surface-micromachining applications," Sens. Actuators A, Phys., vol. 58, pp. 149-157, 1997.
14. J. M. Olson, "Analysis of LPCVD process conditions for the deposition of low stress silicon nitride - Part 1: Preliminary LPCVD experiments," Mater. Sci. Semiconduct. Process., vol. 5, pp. 51-60, 2002.
15. S. Lee, T. M. Wallis, J. Moreland, Y. C. Lee, and P. Kabos, "Near-field imaging of high-frequency magnetic fields with calorimetric cantilever probes," J. Appl. Phys., vol. 99, 2006.