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Volumn 38, Issue 2, 2007, Pages 250-253
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A method for measuring bending stresses based on electromagnetic actuation and Raman spectroscopy
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Author keywords
Bending stresses; Electromagnetic actuation; Fracture strength; MEMS; Micro Raman spectroscopy
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Indexed keywords
ELECTROMECHANICAL DEVICES;
FRACTURE;
FRACTURE TOUGHNESS;
RAMAN SPECTROSCOPY;
BENDING STRESS;
ELECTROMAGNETIC ACTUATION;
LIFESPANS;
MASS STRUCTURE;
MEASUREMENT METHODS;
MICRO RAMAN SPECTROSCOPY;
MICROELECTROMECHANICAL SYSTEM DESIGN;
MICROMACHINED STRUCTURES;
STRESSES MEASUREMENTS;
MEMS;
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EID: 33947177539
PISSN: 03770486
EISSN: 10974555
Source Type: Journal
DOI: 10.1002/jrs.1649 Document Type: Article |
Times cited : (2)
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References (15)
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