MEMS Manufacturing Testing: An Accelerometer Case Study

IEEE International Test Conference (TC)

Volumn , Issue , 2003, Pages 843-849

  Maudie, Theresa ^a   Hardt, Alex ^a   Nielsen, Rick ^a   Stanerson, Dennis ^a   Bieschke, Ron ^a   Miller, Mike ^a  

^a MOTOROLA INC   (United States)

Author keywords

Accelerometers; Electrical Trim; Measurements; MEMS

Indexed keywords

ACCELEROMETERS; ELECTROSTATICS; INTEGRATED CIRCUITS; PROM;

ELECTRICAL TRIM;

MICROELECTROMECHANICAL DEVICES;

EID: 0142215954     PISSN: 10893539     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (6)

1. Christopher Bang, Victor Bright, Mike Mignardi, Thomas Kocian, and David J. Monk, "Assembly and Test for MEMS and Optical MEMS," SPIE, 2001.
2. S. Blanton et.al., Internal Report, (Aug 1999)
3. Theresa Maudie, Todd Miller, Rick Nielsen, Dan Wallace, Terry Ruehs, and Dave Zehrback, "Challenges of MEMS Device Characterization in Engineering Development and Final Manufacturing," IEEE AutoTestCon, August 1998.
4. Delta Handler Sales Literature
5. Multitest Handler Sales Literature
6. C.M. Harris and C.E. Crede, Shock and Vibration Handbook. Vol. 2, Chapter 25, McGraw-Hill.