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Volumn 6, Issue 3, 2006, Pages 755-769

A low-power/low-noise readout circuit for integrated capacitive sensors

Author keywords

ASIC; Capacitive sensor; CMOS analog IC; Lowpower; Switched capacitor

Indexed keywords

APPLICATION SPECIFIC INTEGRATED CIRCUITS; CAPACITANCE MEASUREMENT; CMOS INTEGRATED CIRCUITS; ELECTRIC POWER UTILIZATION; INTERCONNECTION NETWORKS; OPERATIONAL AMPLIFIERS; SPURIOUS SIGNAL NOISE;

EID: 33947158112     PISSN: 1530437X     EISSN: None     Source Type: Journal    
DOI: 10.1109/JSEN.2006.874439     Document Type: Article
Times cited : (23)

References (34)
  • 3
    • 0032139387 scopus 로고    scopus 로고
    • Bulk micromachining of silicon
    • Aug
    • G. I. A. Kovacs, N. I. Maluf, and K. E. Petersen, "Bulk micromachining of silicon," Proc. IEEE, vol. 86, no. 8, pp. 1536-1551, Aug. 1998.
    • (1998) Proc. IEEE , vol.86 , Issue.8 , pp. 1536-1551
    • Kovacs, G.I.A.1    Maluf, N.I.2    Petersen, K.E.3
  • 4
    • 0036255968 scopus 로고    scopus 로고
    • A monolithic fullyintegrated vacuum-sealed CMOS pressure sensor
    • Jan
    • A. V. Chavan and K. Wise, "A monolithic fullyintegrated vacuum-sealed CMOS pressure sensor," IEEE Trans. Electron Devices, vol. 49 no. 1, pp. 164-169, Jan. 2002.
    • (2002) IEEE Trans. Electron Devices , vol.49 , Issue.1 , pp. 164-169
    • Chavan, A.V.1    Wise, K.2
  • 5
    • 0031175825 scopus 로고    scopus 로고
    • A solid-state pressure-sensing microsystem for biomedical applications
    • S. Chatzandroulis, D. Goustouridis, P. Normand, and D. Tsoukalas, "A solid-state pressure-sensing microsystem for biomedical applications," Sens. Actuators A, vol. 62, pp. 551-555, 1997.
    • (1997) Sens. Actuators A , vol.62 , pp. 551-555
    • Chatzandroulis, S.1    Goustouridis, D.2    Normand, P.3    Tsoukalas, D.4
  • 7
    • 0000616369 scopus 로고    scopus 로고
    • A novel sensor cell architecture and sensing circuit scheme for capacitive fingerprint sensors
    • Oct
    • H. Morimura, S. Shigematsu, and K. Machida, "A novel sensor cell architecture and sensing circuit scheme for capacitive fingerprint sensors," IEEE J. Solid-Stale Circuits, vol. 35, no. 5, pp. 724-731, Oct. 2000.
    • (2000) IEEE J. Solid-Stale Circuits , vol.35 , Issue.5 , pp. 724-731
    • Morimura, H.1    Shigematsu, S.2    Machida, K.3
  • 8
    • 0034835867 scopus 로고    scopus 로고
    • A capacitive-sensor interface circuit based on a first-order charge-balanced SC-oscillator
    • X. Li and G. C. M. Meijer, "A capacitive-sensor interface circuit based on a first-order charge-balanced SC-oscillator," in Proc. IEEE 18th Instrumentation and Measurement Technology Conf., 2001, vol. 1, pp. 282-285.
    • (2001) Proc. IEEE 18th Instrumentation and Measurement Technology Conf , vol.1 , pp. 282-285
    • Li, X.1    Meijer, G.C.M.2
  • 10
    • 0024057437 scopus 로고
    • A digital readout technique for capacitive sensor applications
    • Aug
    • J. T. Kung, H.-S. Lee, and R. T. Howe, "A digital readout technique for capacitive sensor applications," IEEE J. Solid-State Circuits, vol. 23, no. 4, pp. 972-977, Aug. 1988.
    • (1988) IEEE J. Solid-State Circuits , vol.23 , Issue.4 , pp. 972-977
    • Kung, J.T.1    Lee, H.-S.2    Howe, R.T.3
  • 12
    • 0030737329 scopus 로고    scopus 로고
    • A capacitive sensing integrated circuit for detection of micromotor critical angles
    • Feb
    • S. L. Garveric, M. L. Nagy, N. K. Rao, D. K. Hartsfield, and A. Purushotham, "A capacitive sensing integrated circuit for detection of micromotor critical angles," IEEE J. Solid-State Circuits, vol. 32, no. 1, pp. 23-30, Feb. 1997.
    • (1997) IEEE J. Solid-State Circuits , vol.32 , Issue.1 , pp. 23-30
    • Garveric, S.L.1    Nagy, M.L.2    Rao, N.K.3    Hartsfield, D.K.4    Purushotham, A.5
  • 13
    • 0031077992 scopus 로고    scopus 로고
    • A capacitive pressure sensor interface using oversampling Δ - Σ demodulation techniques
    • Feb
    • M. Yamada and K. Watanabe, "A capacitive pressure sensor interface using oversampling Δ - Σ demodulation techniques," IEEE Trans. Instrum. Meas., vol. 46, no. 1, pp. 3-7, Feb. 1997.
    • (1997) IEEE Trans. Instrum. Meas , vol.46 , Issue.1 , pp. 3-7
    • Yamada, M.1    Watanabe, K.2
  • 14
    • 0026817547 scopus 로고
    • A switched-capacitor interface for capacitive pressure sensors
    • Feb
    • M. Yamada, T. Takebayashi, S.-I. Notoyama, and K. Watanabe, "A switched-capacitor interface for capacitive pressure sensors," IEEE Trans. Instrum. Meas., vol. 41, no. 1, pp. 81-86, Feb. 1992.
    • (1992) IEEE Trans. Instrum. Meas , vol.41 , Issue.1 , pp. 81-86
    • Yamada, M.1    Takebayashi, T.2    Notoyama, S.-I.3    Watanabe, K.4
  • 15
    • 0031988291 scopus 로고    scopus 로고
    • High-accuracy circuits for on-chip capacitive ratio testing and sensor readout
    • Feb
    • B. Wang, T. Kajita, T. Sun, and G. Ternes, "High-accuracy circuits for on-chip capacitive ratio testing and sensor readout," IEEE Trans. Instrum. Meas., vol. 47, no. 1, pp. 16-20, Feb. 1998.
    • (1998) IEEE Trans. Instrum. Meas , vol.47 , Issue.1 , pp. 16-20
    • Wang, B.1    Kajita, T.2    Sun, T.3    Ternes, G.4
  • 16
    • 0028514298 scopus 로고
    • High-accuracy circuits for on-chip capacitance ratio testing or sensor readout
    • Sep
    • Y. Cao and G. Temes, "High-accuracy circuits for on-chip capacitance ratio testing or sensor readout," IEEE Trans. Circuits Syst. II, Analog Digit. Signal Process., vol. 41, no. 9, pp. 637-639, Sep. 1994.
    • (1994) IEEE Trans. Circuits Syst. II, Analog Digit. Signal Process , vol.41 , Issue.9 , pp. 637-639
    • Cao, Y.1    Temes, G.2
  • 17
    • 0035483770 scopus 로고    scopus 로고
    • A high-accuracy digital readout technique for humidity sensor
    • Oct
    • X. Shi, H. Matsumoto, and K. Murao, "A high-accuracy digital readout technique for humidity sensor," IEEE Trans. Instrum. Meas., vol. 50, no. 5, pp. 1277-1282, Oct. 2001.
    • (2001) IEEE Trans. Instrum. Meas , vol.50 , Issue.5 , pp. 1277-1282
    • Shi, X.1    Matsumoto, H.2    Murao, K.3
  • 18
    • 3042698522 scopus 로고    scopus 로고
    • A wireless microsensor for monitoring flow and pressure in a blood vessel utilizing a dual-inductor antenna stent and two pressure sensors
    • K. Takahata, A. DeHennis, K. D. Wise, and Y. B. Gianchandani, "A wireless microsensor for monitoring flow and pressure in a blood vessel utilizing a dual-inductor antenna stent and two pressure sensors," in Proc. Micro IEEE 17th Int. Conf. Electro Mechanical Systems, 2004, pp. 216-219.
    • (2004) Proc. Micro IEEE 17th Int. Conf. Electro Mechanical Systems , pp. 216-219
    • Takahata, K.1    DeHennis, A.2    Wise, K.D.3    Gianchandani, Y.B.4
  • 19
    • 0024122016 scopus 로고
    • An ultra-miniature solid-state pressure sensor for a cardiovascular catheter
    • Dec
    • H.-L. Chau and K. D. Wise, "An ultra-miniature solid-state pressure sensor for a cardiovascular catheter," IEEE Trans. Electron Devices, vol. 35, no. 12, pp. 2355-2362, Dec. 1988.
    • (1988) IEEE Trans. Electron Devices , vol.35 , Issue.12 , pp. 2355-2362
    • Chau, H.-L.1    Wise, K.D.2
  • 21
    • 1542301053 scopus 로고    scopus 로고
    • Touch mode capacitive pressure sensor for passive tire monitoring system
    • S. Yamamoto, O. Nakao, and H. Nishimura, "Touch mode capacitive pressure sensor for passive tire monitoring system," in Proc. IEEE Sensors Conf., 2002, vol. 2, pp. 1582-1586.
    • (2002) Proc. IEEE Sensors Conf , vol.2 , pp. 1582-1586
    • Yamamoto, S.1    Nakao, O.2    Nishimura, H.3
  • 22
    • 33947151828 scopus 로고    scopus 로고
    • A new SOI monolithic capacitive sensor for absolute and differential pressure measurements
    • to be published
    • P. D. Dimitropoulos, C. Kachris, D. P. Karampatzakis, and G. I. Stamoulis, "A new SOI monolithic capacitive sensor for absolute and differential pressure measurements," Sens. Actuators, to be published.
    • Sens. Actuators
    • Dimitropoulos, P.D.1    Kachris, C.2    Karampatzakis, D.P.3    Stamoulis, G.I.4
  • 24
    • 0035394654 scopus 로고    scopus 로고
    • Analysis of the dynamic behavior of a charge-transfer amplifier
    • Jul
    • W. J. Marble and D. T. Comer, "Analysis of the dynamic behavior of a charge-transfer amplifier," IEEE Trans. Circuits Syst. I, Fundam. Theory Appl., vol. 48, no. 7, pp. 793-804, Jul. 2001.
    • (2001) IEEE Trans. Circuits Syst. I, Fundam. Theory Appl , vol.48 , Issue.7 , pp. 793-804
    • Marble, W.J.1    Comer, D.T.2
  • 25
    • 0036287651 scopus 로고    scopus 로고
    • Pure-capacitance-load source-follower comparators for low-power winner-take-all circuitry
    • S. Nomura and T. Shibata, "Pure-capacitance-load source-follower comparators for low-power winner-take-all circuitry," in Proc. IEEE Int. Symp. Circuits Systems, 2002, vol. 3, pp. 759-762.
    • (2002) Proc. IEEE Int. Symp. Circuits Systems , vol.3 , pp. 759-762
    • Nomura, S.1    Shibata, T.2
  • 27
    • 0035483204 scopus 로고    scopus 로고
    • A switched-capacitor interface for differential capacitance transducers
    • Oct
    • S. Ogawa, Y. Oisugi, K. Mochizuki, and K. Watanabe, "A switched-capacitor interface for differential capacitance transducers," IEEE Trans. Instmm. Meas., vol. 50, no. 5, pp. 1296-1301, Oct. 2001.
    • (2001) IEEE Trans. Instmm. Meas , vol.50 , Issue.5 , pp. 1296-1301
    • Ogawa, S.1    Oisugi, Y.2    Mochizuki, K.3    Watanabe, K.4
  • 28
    • 27944498977 scopus 로고    scopus 로고
    • A low-power CMOS VLSI circuit for signal-conditioning in integrated capacitive sensors
    • presented at the, Vienna, Austria, Oct
    • P. D. Dimitropoulos, S. P. Nikolaidis, D. P. Karampatzakis, and G. I. Stamoulis, "A low-power CMOS VLSI circuit for signal-conditioning in integrated capacitive sensors," presented at the Proc. IEEE Sensors Conf., Vienna, Austria, Oct. 2004.
    • (2004) Proc. IEEE Sensors Conf
    • Dimitropoulos, P.D.1    Nikolaidis, S.P.2    Karampatzakis, D.P.3    Stamoulis, G.I.4
  • 29
    • 33947137540 scopus 로고    scopus 로고
    • Available
    • [Online]. Available: http://www.xfab.com
  • 30
    • 0023330760 scopus 로고
    • Measurement and analysis of charge injection in MOS analog switches
    • Feb
    • J.-H. Shieh, M. Patil, and G. J. Sheu, "Measurement and analysis of charge injection in MOS analog switches," IEEE J. Solid-Slate Circuits, vol. SSC-22, no. 2, pp. 277-281, Feb. 1987.
    • (1987) IEEE J. Solid-Slate Circuits , vol.SSC-22 , Issue.2 , pp. 277-281
    • Shieh, J.-H.1    Patil, M.2    Sheu, G.J.3
  • 31
    • 0014739342 scopus 로고
    • A second generation current conveyor and its applications
    • Feb
    • A. Sedra and K. C. Smith, "A second generation current conveyor and its applications," IEEE Trans. Circuit Theory, vol. CT-17, no. 1, pp. 132-134, Feb. 1970.
    • (1970) IEEE Trans. Circuit Theory , vol.CT-17 , Issue.1 , pp. 132-134
    • Sedra, A.1    Smith, K.C.2
  • 34
    • 33947099264 scopus 로고    scopus 로고
    • Available
    • [Online]. Available: http://www.cadence.com


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.