A solid-state pressure-sensing microsystem for biomedical applications

Sensors and Actuators, A: Physical

Volumn 62, Issue 1-3, 1997, Pages 551-555

  Chatzandroulis, Stavros ^a   Goustouridis, Dimitris ^a   Normand, Pascal ^a   Tsoukalas, Dimitris ^a,b  

^a INSTITUTE OF MICROELECTRONICS   (Greece)

^b IBM T J WATSON RESEARCH CENTER   (United States)

Author keywords

Biomedical applications; Microsystems; Pressure sensors

Indexed keywords

CAPACITORS; DETECTOR CIRCUITS; MEDICAL APPLICATIONS; SILICON SENSORS; SILICON WAFERS;

SILICON FUSION BONDING; SOLID STATE PRESSURE SENSING MICROSYSTEMS;

PRESSURE TRANSDUCERS;

EID: 0031175825     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0924-4247(97)01567-7     Document Type: Article

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