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Volumn 46, Issue 1, 1997, Pages 3-7

A capacitive pressure sensor interface using oversampling Δ-Σ demodulation techniques

Author keywords

Capacitance measurement; Capacitance transducer; Digital filters; Pressure measurement; Pulse width modulation; Sigma delta demodulation; Signal processing

Indexed keywords

CAPACITANCE MEASUREMENT; CAPACITORS; DEMODULATION; DIGITAL FILTERS; ENCODING (SYMBOLS); LINEARIZATION; MATHEMATICAL MODELS; MODULATORS; PRESSURE MEASUREMENT; PULSE WIDTH MODULATION; SIGNAL PROCESSING; TRANSDUCERS;

EID: 0031077992     PISSN: 00189456     EISSN: None     Source Type: Journal    
DOI: 10.1109/19.552148     Document Type: Article
Times cited : (56)

References (12)
  • 2
    • 0015588568 scopus 로고
    • "An 1C piezoresistive pressure sensor for biomédical instrumentation"
    • Mar.
    • K. Samaun D. Wise and J. B. Angell "An 1C piezoresistive pressure sensor for biomédical instrumentation" IEEE Trans. Biomed. Eng. Vol. BMC20 pp. 101-109 Mar. 1973.
    • (1973) IEEE Trans. Biomed. Eng. Vol. BMC , vol.20 , pp. 101-109
    • Samaun, K.1    Wise, D.2    Angell, J.B.3
  • 3
    • 0020809049 scopus 로고
    • "Integrated piezoresistive pressure sensor with both voltage and frequency outputs"
    • S. Sugiyama M. Takigawa and I. Igarashi "Integrated piezoresistive pressure sensor with both voltage and frequency outputs" Sens. Actuators vol. 4 pp. 113-120 1983.
    • (1983) Sens. Actuators , vol.4 , pp. 113-120
    • Sugiyama, S.1    Takigawa, M.2    Igarashi, I.3
  • 4
    • 0019899398 scopus 로고
    • "A batch-fabricated silicon capacitive pressure sensor with low temperature sensitivity"
    • Jan.
    • Y. S. Lee and K. D. Wise "A batch-fabricated silicon capacitive pressure sensor with low temperature sensitivity" IEEE Trans. Electron Devices vol. ED-29 pp. 42-48 Jan. 1982.
    • (1982) IEEE Trans. Electron Devices Vol. ED , vol.29 , pp. 42-48
    • Lee, Y.S.1    Wise, K.D.2
  • 5
    • 0022820424 scopus 로고
    • "Solid-state capacitive pressure transducers"
    • W. H. Ko "Solid-state capacitive pressure transducers" Sens. Actuators vol. 10 pp. 303-320 1986.
    • (1986) Sens. Actuators , vol.10 , pp. 303-320
    • Ko, W.H.1
  • 6
    • 0018753690 scopus 로고
    • "Pressure sensitivity in anisotropically etched thin-diaphragm pressure sensors"
    • Dec.
    • S. K. Clark and K. D. Wise "Pressure sensitivity in anisotropically etched thin-diaphragm pressure sensors" IEEE Trans. Electron Devices vol. ED-26 pp. 1887-1896 Dec. 1979.
    • (1979) IEEE Trans. Electron Devices , vol.VOL. ED-26 , pp. 1887-1896
    • Clark, S.K.1    Wise, K.D.2
  • 7
    • 0023532099 scopus 로고
    • "A switched-capacitor charge balancing analog-to-digital converter and its application to capacitance measurement"
    • Dec.
    • H. Matsumoto H. Shimizu and K. Watanabe "A switched-capacitor charge balancing analog-to-digital converter and its application to capacitance measurement" IEEE Trans. Instrum. Meas. Vol. IM36 pp. 873-878 Dec. 1987.
    • (1987) IEEE Trans. Instrum. Meas. Vol. IM , vol.36 , pp. 873-878
    • Matsumoto, H.1    Shimizu, H.2    Watanabe, K.3
  • 10
    • 0028754710 scopus 로고
    • "Artificial neural networkbased nonlinearity estimation of pressure sensors"
    • Dec.
    • J. C. Patra G. Panda and R. Baliarsingh "Artificial neural networkbased nonlinearity estimation of pressure sensors" IEEE Trans. Instrum. Meas. vol. 43 pp. 874-881 Dec. 1994.
    • (1994) IEEE Trans. Instrum. Meas. , vol.43 , pp. 874-881
    • Patra, J.C.1    Panda, G.2    Baliarsingh, R.3


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.