Force-Guided Assembly of Micro Mirrors

IEEE International Conference on Intelligent Robots and Systems

Volumn 3, Issue , 2003, Pages 2149-2154

  Shen, Yantao ^a   Xi, Ning ^a   Li, Wen Jung ^b  

^a Michigan State University   (United States)

^b CHINESE UNIVERSITY OF HONG KONG   (Hong Kong)

Author keywords

[No Author keywords available]

Indexed keywords

FLUORINE CONTAINING POLYMERS; FORCE CONTROL; MIRRORS; PIEZOELECTRIC DEVICES; SENSORS; SIGNAL PROCESSING;

MICRO MIRRORS; PIEZOELECTRIC FORCE SENSING;

MICROELECTROMECHANICAL DEVICES;

EID: 0347409421     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (8)

1. J. R. Reid, V. M. Bright, J. H. Comtois. Automated Assembly of Flip-up Micromirrors. International Conference on Solid State Sensors and Actuators, 1997. TRANSDUCERS '97 Chicago., 1997, vol. 1. pp. 347-350.
2. E. E. Hui, R. T. Howe, and M. S. Rodgers. Single-Step Assembly of Complex 3-D Microstructures. IEEE MEMS 2000, pp. 602-607.
3. S. K. Koelemijer Chollet, L. Benmayor, J.-M. Uehlinger and J. Jacot, Cost Effective Micro-System Assembly Automation, Emerging Technologies and Factory Automation. Proceedings. ETFA '99. Vol. 1, pp. 359-366, 1999.
4. S. Fatikow, J. Seyfried, S. Fahlbusch, A. Buerkle, and F. Schmoeckel, A Flexible Microrobot-Based Microassembly Station, Journal of Intelligent and Robotics Systems, Vol. 27, pp. 135-169, 2000.
5. Y. Zhou, B. J. Nelson and B. Vikramaditya. Fusing Force and Vision Feedback for Micromanpulation ICRA1998, pp. 1220-1225, 1998.
6. T. Tanikawa, M. Kawai, N. Koyachi, T. Arai, T. Ide, S. Kaneko, R. Ohta and T. Hirose. Force Control System for Autonomous Micro Manipulation, ICRA2001, pp. 610-615, 2001.
7. C. K. M. Fung, I. Elhajj, W. J. Li, and N. Xi A 2-D PVDF Force Sensing System for Micro-manipulation and Micro-assembly, ICRA2002, pp. 1489-1494, 2002
8. T. J. Tarn, Y. Y. Wu, N. Xi, and A. Isidori, Force Regulation and Contact Transition Control, IEEE Control Systems, pp. 32-40, February 1996.