Measurements of mechanical properties of microfabricated thin films

Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 1997, Pages 430-435

  Ogawa, H ^a   Suzuki, K ^a   Kaneko, S ^a   Nakano, Y ^a   Ishikawa, Y ^a   Kitahara, T ^a  

^a NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY AIST   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ELASTIC MODULI; MAGNETRON SPUTTERING; MICROMACHINING; MICROMETERS; STRAIN MEASUREMENT; TENSILE STRENGTH; TENSILE TESTING; TITANIUM;

MICROFABRICATED THIN FILMS;

THIN FILMS;

EID: 0030717785     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (7)